Patent Assignment Details
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Reel/Frame: | 013549/0370 | |
| Pages: | 3 |
| | Recorded: | 12/02/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10242327
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Filing Dt:
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09/12/2002
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Publication #:
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Pub Dt:
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04/17/2003
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Title:
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Method for removing the harmful effects of organic halogen compound gas, apparatus for removing the harmful effects of organic halogen compound gas, system for fabricating semiconductor devices, and method for fabricating semiconductor devices
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Assignee
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4-1, NISHI-SHINJUKU 2-CHOME |
SHINJUKU-KU |
TOKYO, JAPAN |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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G. GREGORY SCHIVLEY/BRYANT E. WADE
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P.O. BOX 828
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BLOOMFIELD HILLS, MI 48303
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