Patent Assignment Details
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| Reel/Frame: | 014516/0372 | |
| Pages: | 2 |
| | Recorded: | 09/18/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/29/2005
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Application #:
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10664440
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Filing Dt:
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09/18/2003
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Publication #:
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Pub Dt:
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04/08/2004
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Title:
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PATTERN WIDTH MEASURING APPARATUS, PATTERN WIDTH MEASURING METHOD, AND ELECTRON BEAM EXPOSURE APPARATUS
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Assignee
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| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO 179-0071, JAPAN |
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Correspondence name and address
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MORRISON & FOERSTER LLP
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DAVID L. FEHRMAN
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555 WEST FIFTH STREET, SUITE 3500
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LOS ANGELES, CA 90013-1024
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