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Patent Assignment Details
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Reel/Frame:008401/0373   Pages: 14
Recorded: 03/13/1997
Conveyance: COLLATERAL ASSIGNMENT, PATENT MORTGAGE AND SECURITY AGREEMENT
Total properties: 2
1
Patent #:
Issue Dt:
08/06/1996
Application #:
08285316
Filing Dt:
08/03/1994
Title:
APPARATUS FOR DELIVERING ULTRA-LOW PARTICLE COUNTS IN SEMICONDUCTOR MANUFACTURING
2
Patent #:
Issue Dt:
11/05/1996
Application #:
08437541
Filing Dt:
05/09/1995
Title:
A METHOD FOR CLEANING AND DRYING A SEMICONDUCTOR WAFER
Assignor
1
Exec Dt:
03/05/1997
Assignee
1
3003 TASMAN DRIVE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
COOLEY GODWARD LLP
APRIL M. PIERCEY
5 PALO ALTO SQUARE
3000 EL CAMINO REAL, 6TH FLOOR
PALO ALTO, CA 94306

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