Patent Assignment Details
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Reel/Frame: | 021740/0373 | |
| Pages: | 3 |
| | Recorded: | 10/27/2008 | | |
Attorney Dkt #: | 21070-0031001 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12235277
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Filing Dt:
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09/22/2008
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Publication #:
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Pub Dt:
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02/12/2009
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Title:
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ILLUMINATION SYSTEM FOR EUV LITHOGRAPHY
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Assignee
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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CHRIS C. BOWLEY
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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