Patent Assignment Details
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Reel/Frame: | 007174/0374 | |
| Pages: | 12 |
| | Recorded: | 08/22/1994 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/12/1996
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Application #:
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08269861
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Filing Dt:
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06/30/1994
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Title:
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A CHEMICAL ETCH MONITOR FOR MEASURING FILM ETCHING UNIFORMITY DURING A CHEMICAL ETCHING PROCESS
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Assignee
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OLD ORCHARD ROAD ARMONK, NY 10504 |
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Correspondence name and address
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IBM CORPORATION
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DALE M. CROCKATT
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INTELLECTUAL PROPERTY LAW DEPT.
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1580 ROUTE 52, DEPT. 18G/BLDG. 300-482
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HOPEWELL JUNCTION, NY 12533-6531
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