Patent Assignment Details
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Reel/Frame: | 012332/0376 | |
| Pages: | 5 |
| | Recorded: | 12/03/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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09938257
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Filing Dt:
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08/23/2001
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Publication #:
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Pub Dt:
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02/27/2003
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Title:
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SYSTEM AND METHOD OF FAST AMBIENT SWITCHING FOR RAPID THERMAL PROCESSING
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Assignee
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108 CHERRY HILL DRIVE |
BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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LAHIVE & COCKFIELD
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ANTHONY A. LAURENTANO
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28 STATE STREET
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BOSTON, MA 02109
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