Patent Assignment Details
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Reel/Frame: | 022471/0391 | |
| Pages: | 6 |
| | Recorded: | 03/30/2009 | | |
Attorney Dkt #: | TTI-221 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/04/2011
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Application #:
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12414637
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Filing Dt:
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03/30/2009
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Publication #:
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Pub Dt:
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09/30/2010
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Title:
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CONTROLLING ANGLE OF INCIDENCE OF MULTIPLE- BEAM OPTICAL METROLOGY TOOLS
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Assignee
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3-1 AKASAKA 5-CHOME MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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4350 W. CHANDLER BLVD.
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SUITE 10
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CHANDLER, AZ 85226
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