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Total properties:
19
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Patent #:
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Issue Dt:
|
07/13/2004
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Application #:
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10299031
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Filing Dt:
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11/18/2002
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Publication #:
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Pub Dt:
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08/14/2003
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Title:
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OPTICAL ARRANGEMENT, LITTROW GRATING FOR USE IN AN OPTICAL ARRANGEMENT AND ALSO USE OF A LITTROW GRATING
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Patent #:
|
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Issue Dt:
|
01/13/2009
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Application #:
|
10441990
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Filing Dt:
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05/20/2003
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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OPTICAL IMAGING SYSTEM FOR IMAGING AT LEAST TWO PLANES OF A LIGHT BEAM SPACED APART IN THE BEAM DIRECTION
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Patent #:
|
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Issue Dt:
|
08/15/2006
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Application #:
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10885411
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Filing Dt:
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07/07/2004
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Publication #:
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Pub Dt:
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02/10/2005
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Title:
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OPTICAL ARRANGEMENT, OPTICAL GRATING AND METHOD FOR THE MANUFACTURE OF SUCH AN OPTICAL GRATING
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Patent #:
|
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Issue Dt:
|
01/22/2008
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Application #:
|
11013188
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Filing Dt:
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12/15/2004
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Publication #:
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Pub Dt:
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06/16/2005
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Title:
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METHOD AND OPTICAL ARRANGEMENT FOR BEAM GUIDING OF A LIGHT BEAM WITH BEAM DELAY
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Patent #:
|
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Issue Dt:
|
02/03/2009
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Application #:
|
11013189
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Filing Dt:
|
12/15/2004
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Publication #:
|
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Pub Dt:
|
06/16/2005
| | | | |
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Title:
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OPTICAL DELAY MODULE FOR LENGTHENING THE PROPAGATION PATH OF A LIGHT BEAM AND PULSE MULTIPLICATION OR ELONGATION MODULE
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|
|
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Patent #:
|
|
Issue Dt:
|
12/08/2009
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Application #:
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11418872
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Filing Dt:
|
05/05/2006
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Publication #:
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Pub Dt:
|
11/06/2008
| | | | |
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Title:
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OPTICAL DEVICES AND RELATED SYSTEMS AND METHODS
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|
|
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Patent #:
|
|
Issue Dt:
|
03/06/2007
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Application #:
|
11448779
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Filing Dt:
|
06/08/2006
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Publication #:
|
|
Pub Dt:
|
10/12/2006
| | | | |
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Title:
|
OPTICAL GRATING AND METHOD FOR THE MANUFACTURE OF SUCH AN OPTICAL GRATING
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/27/2012
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Application #:
|
12341576
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Filing Dt:
|
12/22/2008
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Publication #:
|
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Pub Dt:
|
04/23/2009
| | | | |
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Title:
|
OPTICAL DELAY MODULE FOR LENGTHENING THE PROPAGATION PATH OF A LIGHT BEAM AND PULSE MULTIPLICATION OR ELONGATION MODULE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/16/2012
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Application #:
|
12558874
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Filing Dt:
|
09/14/2009
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Publication #:
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Pub Dt:
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04/01/2010
| | | | |
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Title:
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METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND SPECTROMETER ARRANGEMENT
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|
|
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Patent #:
|
|
Issue Dt:
|
05/14/2013
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Application #:
|
12822415
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Filing Dt:
|
06/24/2010
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Publication #:
|
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Pub Dt:
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12/30/2010
| | | | |
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Title:
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OPTICAL ARRANGEMENT, METHOD OF USE, AND METHOD FOR DETERMINING A DIFFRACTION GRATING
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/04/2013
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Application #:
|
12838149
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Filing Dt:
|
07/16/2010
|
|
Publication #:
|
|
Pub Dt:
|
02/03/2011
| | | | |
|
Title:
|
OPTICAL SYSTEM HAVING HEAT DISSIPATION ARRANGEMENT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/01/2013
|
Application #:
|
12851187
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Filing Dt:
|
08/05/2010
|
|
Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
|
Title:
|
REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/29/2016
|
Application #:
|
13686101
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Filing Dt:
|
11/27/2012
|
|
Publication #:
|
|
Pub Dt:
|
04/04/2013
| | | | |
|
Title:
|
MIRROR WITH DIELECTRIC COATING
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13753127
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Filing Dt:
|
01/29/2013
|
|
Publication #:
|
|
Pub Dt:
|
07/11/2013
| | | | |
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Title:
|
EUV COLLECTOR MIRROR SHELL OF AN EUV COLLECTOR FOR EUV LITHOGRAPHY
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/26/2015
|
Application #:
|
14074207
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Filing Dt:
|
11/07/2013
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|
Publication #:
|
|
Pub Dt:
|
05/01/2014
| | | | |
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Title:
|
OPTICAL ARRANGEMENT FOR CONVERTING AN INCIDENT LIGHT BEAM, METHOD FOR CONVERTING A LIGHT BEAM TO A LINE FOCUS, AND OPTICAL DEVICE THEREFOR
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/03/2018
|
Application #:
|
14227352
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Filing Dt:
|
03/27/2014
|
|
Publication #:
|
|
Pub Dt:
|
07/31/2014
| | | | |
|
Title:
|
OPTICAL ELEMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2017
|
Application #:
|
14321149
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Filing Dt:
|
07/01/2014
|
|
Publication #:
|
|
Pub Dt:
|
01/08/2015
| | | | |
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Title:
|
REFLECTIVE OPTICAL ELEMENT FOR GRAZING INCIDENCE IN THE EUV WAVELENGTH RANGE
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14492949
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Filing Dt:
|
09/22/2014
|
|
Publication #:
|
|
Pub Dt:
|
03/26/2015
| | | | |
|
Title:
|
COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14519449
|
Filing Dt:
|
10/21/2014
|
|
Publication #:
|
|
Pub Dt:
|
04/02/2015
| | | | |
|
Title:
|
METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT
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|
