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Total properties:
23
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Patent #:
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|
Issue Dt:
|
05/18/1982
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Application #:
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06038667
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Filing Dt:
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05/14/1979
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Title:
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POSITION CONTROL CIRCUIT
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Patent #:
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Issue Dt:
|
09/21/1982
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Application #:
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06082484
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Filing Dt:
|
10/09/1979
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Title:
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IMPROVED SHUTTER MECHANISM
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|
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Patent #:
|
|
Issue Dt:
|
10/19/1982
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Application #:
|
06082485
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Filing Dt:
|
10/09/1979
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|
Title:
|
IMPROVED SHUTTER MECHANISM
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|
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Patent #:
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|
Issue Dt:
|
06/29/1982
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Application #:
|
06083769
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Filing Dt:
|
10/11/1979
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Title:
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SHOCK AND VIBRATION ISOLATION SYSTEM
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Patent #:
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Issue Dt:
|
05/11/1982
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Application #:
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06083770
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Filing Dt:
|
10/11/1979
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|
Title:
|
SHOCK AND VIBRATION ISOLATION SYSTEM
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|
|
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Patent #:
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|
Issue Dt:
|
08/24/1982
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Application #:
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06087220
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Filing Dt:
|
10/22/1979
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Title:
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TWO STAGE WAFER PREALIGNMENT SYSTEM FOR AN OPTICAL ALIGNMENT AND EXPOSURE MACHINE
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Patent #:
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Issue Dt:
|
07/19/1983
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Application #:
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06129214
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Filing Dt:
|
03/11/1980
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Title:
|
FRICTION DRIVE
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|
|
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Patent #:
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|
Issue Dt:
|
05/17/1983
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Application #:
|
06183402
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Filing Dt:
|
09/02/1980
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|
Title:
|
OPTICAL FOCUSING SYSTEM
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|
|
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Patent #:
|
|
Issue Dt:
|
01/19/1982
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Application #:
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06198358
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Filing Dt:
|
10/20/1980
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Title:
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INTERFEROMETRICALLY CONTROLLED STAGE WITH PRECISELY ORTHOGONAL AXES OF MOTION
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|
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Patent #:
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|
Issue Dt:
|
01/10/1984
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Application #:
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06198364
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Filing Dt:
|
10/20/1980
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Title:
|
X-Y ADDRESSABLE WORKPIECE POSITIONER AND MASK ALIGNER USING SAME
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/21/1983
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Application #:
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06200780
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Filing Dt:
|
10/27/1980
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|
Title:
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ILLUMINATION SYSTEM
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|
|
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Patent #:
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|
Issue Dt:
|
04/17/1984
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Application #:
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06264410
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Filing Dt:
|
05/18/1981
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|
Title:
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ON MACHINE RETICLE INSPECTION DEVICE
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|
|
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Patent #:
|
|
Issue Dt:
|
11/15/1983
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Application #:
|
06278402
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Filing Dt:
|
06/29/1981
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|
Title:
|
ALIGNMENT AND EXPOSURE SYSTEM WITH AN INDICIUM OF AN AXIS OF MOTION OF THE SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/10/1984
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Application #:
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06286985
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Filing Dt:
|
07/27/1981
|
|
Title:
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X-Y ADDRESSABLE WORKPIECE POSITIONER HAVING AN IMPROVED X-Y ADDRESS INDICIA SENSOR
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/08/1983
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Application #:
|
06288680
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Filing Dt:
|
07/31/1981
|
|
Title:
|
GAS BEARING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/1984
|
Application #:
|
06289790
|
Filing Dt:
|
08/03/1981
|
|
Title:
|
STEP-AND-REPEAT PROJECTION ALIGNMENT AND EXPOSURE SYSTEM WITH AUXILIARY OPTICAL UNIT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/27/1983
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Application #:
|
06388147
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Filing Dt:
|
06/14/1982
|
|
Title:
|
FRONTAL ILLUMINATION SYSTEM FOR SEMICONDUCTIVE WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/25/1984
|
Application #:
|
06396099
|
Filing Dt:
|
07/07/1982
|
|
Title:
|
STEP-AND- REPEAT PROJECTION ALIGNMENT AND EXPOSURE SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/29/1985
|
Application #:
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06543432
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Filing Dt:
|
10/19/1983
|
|
Title:
|
GAS BEARING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/18/1987
|
Application #:
|
06568297
|
Filing Dt:
|
01/05/1984
|
|
Title:
|
X-Y ADDRESSABLE WORKPIECE POSITIONER AND MASK ALIGNER USING SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/1986
|
Application #:
|
06615595
|
Filing Dt:
|
05/31/1984
|
|
Title:
|
STEP-AND-REPEAT PROJECTION ALIGNMENT AND EXPOSURE SYSTEM WITH AUXILIARY OPTICAL UNIT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/10/1985
|
Application #:
|
06638709
|
Filing Dt:
|
08/08/1984
|
|
Title:
|
OPTICAL FOCUSING SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/04/1986
|
Application #:
|
06649767
|
Filing Dt:
|
09/12/1984
|
|
Title:
|
IMPROVED STEP-REPEAT PROJECION ALIGNMENT AND EXPOSURE SYSTEM
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|
