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Patent Assignment Details

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Reel/Frame:	021915/0398			Pages:	16
		Recorded:	11/21/2008
Attorney Dkt #:	03594.001200.
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 17

Patent #:	6656540	Issue Dt:	12/02/2003	Application #:	09926624	Filing Dt:	11/27/2001
Publication #:	US20020142572	Pub Dt:	10/03/2002
Title:	METHOD FOR FORMING METALLIC FILM AND APPARATUS FOR FORMING THE SAME

Patent #:	7048973	Issue Dt:	05/23/2006	Application #:	10183512	Filing Dt:	06/28/2002
Publication #:	US20030031791	Pub Dt:	02/13/2003
Title:	METAL FILM VAPOR PHASE DEPOSITION METHOD AND VAPOR PHASE DEPOSITION APPARATUS

Patent #:	NONE	Issue Dt:		Application #:	10277733	Filing Dt:	10/23/2002
Publication #:	US20030091739	Pub Dt:	05/15/2003
Title:	Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Patent #:	7208421	Issue Dt:	04/24/2007	Application #:	10384932	Filing Dt:	03/07/2003
Publication #:	US20040029384	Pub Dt:	02/12/2004
Title:	METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE

Patent #:	NONE	Issue Dt:		Application #:	11132222	Filing Dt:	05/19/2005
Publication #:	US20050217579	Pub Dt:	10/06/2005
Title:	Method and apparatus for production of metal film or the like

Patent #:	7588799	Issue Dt:	09/15/2009	Application #:	11319458	Filing Dt:	12/29/2005
Publication #:	US20060110535	Pub Dt:	05/25/2006
Title:	METAL FILM PRODUCTION APPARATUS

Patent #:	NONE	Issue Dt:		Application #:	11336898	Filing Dt:	01/23/2006
Publication #:	US20060118046	Pub Dt:	06/08/2006
Title:	Metal film vapor phase deposition method and vapor phase deposition apparatus

Patent #:	NONE	Issue Dt:		Application #:	11391241	Filing Dt:	03/29/2006
Publication #:	US20060191481	Pub Dt:	08/31/2006
Title:	Apparatus for the formation of a metal film

Patent #:	NONE	Issue Dt:		Application #:	11635600	Filing Dt:	12/08/2006
Publication #:	US20070163503	Pub Dt:	07/19/2007
Title:	Thin film preparation apparatus

Patent #:	NONE	Issue Dt:		Application #:	11638510	Filing Dt:	12/14/2006
Publication #:	US20070141274	Pub Dt:	06/21/2007
Title:	Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Patent #:	NONE	Issue Dt:		Application #:	11638511	Filing Dt:	12/14/2006
Publication #:	US20070087577	Pub Dt:	04/19/2007
Title:	Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Patent #:	NONE	Issue Dt:		Application #:	11638522	Filing Dt:	12/14/2006
Publication #:	US20070117363	Pub Dt:	05/24/2007
Title:	Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Patent #:	7659209	Issue Dt:	02/09/2010	Application #:	11798883	Filing Dt:	05/17/2007
Publication #:	US20070272655	Pub Dt:	11/29/2007
Title:	BARRIER METAL FILM PRODUCTION METHOD

Patent #:	NONE	Issue Dt:		Application #:	11919341	Filing Dt:	10/26/2007
Publication #:	US20100062602	Pub Dt:	03/11/2010
Title:	Etching method, method for producing dielectric film of low dielectric constant, method for producing porous member, etching system and thin film forming equipment

Patent #:	NONE	Issue Dt:		Application #:	12247432	Filing Dt:	10/08/2008
Publication #:	US20090095425	Pub Dt:	04/16/2009
Title:	APPARATUS FOR THE FORMATION OF A METAL FILM

Patent #:	8250373	Issue Dt:	08/21/2012	Application #:	12260153	Filing Dt:	10/29/2008
Publication #:	US20090055658	Pub Dt:	02/26/2009
Title:	AUTHENTICATING AND VERIFYING AN AUTHENTICABLE AND VERIFIABLE MODULE

Assignor

Exec Dt:

08/29/2008

Assignee

2-5-1 KURIGI, ASAO-KU

KAWASAKI-SHI, JAPAN

Correspondence name and address
	FITZPATRICK, CELLA, HARPER & SCINTO
	30 ROCKEFELLER PLAZA
	NEW YORK, NEW YORK 10112-3800

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