Patent Assignment Details
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| Reel/Frame: | 018801/0401 | |
| Pages: | 3 |
| | Recorded: | 01/12/2007 | | |
| Attorney Dkt #: | 04329.4016 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/02/2008
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Application #:
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11583114
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Filing Dt:
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10/19/2006
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Publication #:
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Pub Dt:
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05/24/2007
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Title:
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CHARGED PARTICLE BEAM EXPOSURE METHOD OF CHARACTER PROJECTION SYSTEM, CHARGED PARTICLE BEAM EXPOSURE DEVICE OF CHARACTER PROJECTION SYSTEM, PROGRAM FOR USE IN CHARGED PARTICLE BEAM EXPOSURE DEVICE, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Assignee
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO 105-8001, JAPAN |
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Correspondence name and address
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MR. ERNEST F. CAPMAN
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FINNEGAN, HENDERSON, FARABOW, ET AL
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901 NEW YORK AVENUE, N.W.
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WASHINGTON, D.C. 20001-4413
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