Patent Assignment Details
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Reel/Frame: | 026340/0404 | |
| Pages: | 2 |
| | Recorded: | 05/26/2011 | | |
Attorney Dkt #: | 08411.0230 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/02/2016
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Application #:
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13051460
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Filing Dt:
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03/18/2011
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Publication #:
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Pub Dt:
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03/22/2012
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Title:
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OVERLAY/ALIGNMENT MEASUREMENT METHOD AND OVERLAY/ALIGNMENT MEASUREMENT APPARATUS
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Assignee
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1-1, SHIBAURA 1-CHOME, MINATO-KU, |
TOKYO,, JAPAN 105-8001 |
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Correspondence name and address
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FINNEGAN HENDERSON
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901 NEW YORK AVE., NW
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WASHINGTON, DC 20001
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