Patent Assignment Details
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Reel/Frame: | 025640/0410 | |
| Pages: | 6 |
| | Recorded: | 01/14/2011 | | |
Attorney Dkt #: | 2010-081 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/15/2014
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Application #:
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12987950
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Filing Dt:
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01/10/2011
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Publication #:
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Pub Dt:
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07/12/2012
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Title:
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TECHNIQUE AND APPARATUS FOR MONITORING ION MASS, ENERGY, AND ANGLE IN PROCESSING SYSTEMS
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Assignee
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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SCOTT R. FABER, ESQ.
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
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35 DORY ROAD
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GLOUCESTER, MA 01930
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