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16406115
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Filing Dt:
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05/08/2019
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Publication #:
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08/29/2019
| | | | |
Title:
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SELECTIVE ILD DEPOSITION FOR FULLY ALIGNED VIA WITH AIRGAP
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NONE
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16454178
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06/27/2019
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10/17/2019
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06/08/2021
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16508691
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07/11/2019
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10/31/2019
| | | | |
Title:
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09/08/2020
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16657169
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10/18/2019
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02/13/2020
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INTERCONNECT STRUCTURE
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02/23/2021
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16682588
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11/13/2019
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03/12/2020
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Title:
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05/24/2022
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16684115
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11/14/2019
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03/26/2020
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Title:
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10/13/2020
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16689142
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11/20/2019
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03/19/2020
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Title:
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SEMICONDUCTOR DEVICE WITH REDUCED VIA RESISTANCE
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01/11/2022
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16689223
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11/20/2019
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Title:
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SEMICONDUCTOR DEVICE WITH REDUCED VIA RESISTANCE
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07/13/2021
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16796614
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02/20/2020
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08/20/2020
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TWO-COLOR SELF-ALIGNED DOUBLE PATTERNING (SADP) TO YIELD STATIC RANDOM ACCESS MEMORY (SRAM) AND DENSE LOGIC
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01/11/2022
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16835056
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03/30/2020
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07/16/2020
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Title:
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03/30/2021
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16868475
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05/06/2020
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12/10/2020
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Title:
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10/12/2021
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16911158
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06/24/2020
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10/15/2020
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FINFET DEVICES
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06/29/2021
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16939415
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07/27/2020
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11/12/2020
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NANOSHEET TRANSISTOR
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02/21/2023
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17007779
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08/31/2020
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12/24/2020
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01/25/2022
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17011823
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09/03/2020
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12/24/2020
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Title:
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COPPER INTERCONNECT STRUCTURE WITH MANGANESE BARRIER LAYER
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05/30/2023
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17175340
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02/12/2021
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06/17/2021
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04/12/2022
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17181269
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02/22/2021
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06/17/2021
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07/05/2022
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17181399
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02/22/2021
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07/01/2021
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11/01/2022
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17187390
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02/26/2021
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06/17/2021
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SEMICONDUCTOR DEVICE WITH REDUCED VIA RESISTANCE
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12/08/2016
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17188350
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03/08/2016
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07/08/2021
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SEMICONDUCTOR STRUCTURES INCLUDING MIDDLE-OF-LINE (MOL) CAPACITANCE REDUCTION FOR SELF-ALIGNED CONTACT IN GATE STACK
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06/13/2023
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17215314
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03/29/2021
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07/15/2021
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SELECTIVE ILD DEPOSITION FOR FULLY ALIGNED VIA WITH AIRGAP
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03/21/2023
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17340915
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06/07/2021
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10/28/2021
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ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
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07/11/2023
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17360819
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06/28/2021
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11/04/2021
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TWO-COLOR SELF-ALIGNED DOUBLE PATTERNING (SADP) TO YIELD STATIC RANDOM ACCESS MEMORY (SRAM) AND DENSE LOGIC
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06/20/2023
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17465135
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09/02/2021
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12/23/2021
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FORMING NANOSHEET TRANSISTOR USING SACRIFICIAL SPACER AND INNER SPACERS
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03/28/2023
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17482903
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09/23/2021
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01/13/2022
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FINFET DEVICES
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01/23/2024
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17546511
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12/09/2021
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05/26/2022
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ADVANCED COPPER INTERCONNECTS WITH HYBRID MICROSTRUCTURE
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10/31/2023
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17556382
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12/20/2021
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04/14/2022
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METHOD OF FORMING COPPER INTERCONNECT STRUCTURE WITH MANGANESE BARRIER LAYER
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NONE
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17688068
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03/07/2022
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08/18/2022
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SELECTIVE GAS ETCHING FOR SELF-ALIGNED PATTERN TRANSFER
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NONE
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17726766
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04/22/2022
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10/06/2022
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METHOD OF FORMING NANOSHEET FIELD EFFECT TRANSISTORS WITH PARTIAL INSIDE SPACERS
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NONE
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17833366
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06/06/2022
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12/22/2022
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FORMING SELF-ALIGNED VIAS AND AIR-GAPS IN SEMICONDUCTOR FABRICATION
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02/25/2025
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17980949
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11/04/2022
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09/21/2023
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SEMICONDUCTOR STRUCTURES INCLUDING MIDDLE-OF-LINE (MOL) CAPACITANCE REDUCTION FOR SELF-ALIGNED CONTACT IN GATE STACK
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NONE
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17992273
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11/22/2022
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10/19/2023
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SELF-FORMING BARRIER FOR USE IN AIR GAP FORMATION
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NONE
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06/03/2025
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18109631
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02/14/2023
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01/25/2024
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ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
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NONE
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18115302
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02/28/2023
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02/01/2024
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FINFET DEVICES
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02/25/2025
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18136641
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04/19/2023
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02/15/2024
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MINIMIZING SHORTING BETWEEN FINFET EPITAXIAL REGIONS
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02/04/2025
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18139199
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04/25/2023
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03/21/2024
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SELECTIVE ILD DEPOSITION FOR FULLY ALIGNED VIA WITH AIRGAP
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11/26/2024
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18195269
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05/09/2023
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04/11/2024
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FORMING NANOSHEET TRANSISTOR USING SACRIFICIAL SPACER AND INNER SPACERS
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05/07/2024
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18201061
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05/23/2023
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03/07/2024
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Title:
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TWO-COLOR SELF-ALIGNED DOUBLE PATTERNING (SADP) TO YIELD STATIC RANDOM ACCESS MEMORY (SRAM) AND DENSE LOGIC
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