Patent Assignment Details
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| Reel/Frame: | 003980/0413 | |
| Pages: | 2 |
| | Recorded: | 05/03/1982 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/23/1985
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Application #:
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06343794
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Filing Dt:
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01/29/1982
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Title:
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APPARATUS FOR THERMAL TREATMENT OF SEMICONDUCTOR WAFERS BY GAS CONDUCTION INCORPORATING PERIPHERAL GAS INLET
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Correspondence name and address
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S. Z. COLES/E-305
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VARIAN ASSOCIATES, INC.
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611 HANSEN WAY
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PALO ALTO, CA 94303
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