Patent Assignment Details
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Reel/Frame: | 018298/0413 | |
| Pages: | 3 |
| | Recorded: | 09/01/2006 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/24/2010
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Application #:
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10569574
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Filing Dt:
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09/01/2006
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Publication #:
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Pub Dt:
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03/15/2007
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Title:
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OBLIQUE MIRROR-TYPE NORMAL-INCIDENCE COLLECTOR SYSTEM FOR LIGHT SOURCES, PARTICULARLY EUV PLASMA DISCHARGE SOURCES
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Assignee
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CARL-ZEISS-STRASSE 22 |
73447 OBERKOCHEN, GERMANY |
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Correspondence name and address
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OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
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ONE LANDMARK SQUARE, 10TH FLOOR
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STAMFORD, CT 06901
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