Patent Assignment Details
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| Reel/Frame: | 017599/0424 | |
| Pages: | 5 |
| | Recorded: | 02/23/2006 | | |
| Attorney Dkt #: | MTI-33557 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/11/2010
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Application #:
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11362409
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Filing Dt:
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02/23/2006
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Publication #:
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Pub Dt:
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08/23/2007
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Title:
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USING POSITIVE DC OFFSET OF BIAS RF TO NEUTRALIZE CHARGE BUILD-UP OF ETCH FEATURES
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Assignee
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| 8000 S. FEDERAL WAY |
| BOISE, IDAHO 83716 |
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Correspondence name and address
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ALAN E. WAGNER
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WHYTE HIRSCHBOECK DUDEK S.C.
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555 EAST WELLS STREET
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SUTIE 1900
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MILWAUKEE, WI 53202
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