Patent Assignment Details
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Reel/Frame: | 044313/0424 | |
| Pages: | 3 |
| | Recorded: | 12/06/2017 | | |
Attorney Dkt #: | 2918.0103C |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/26/2019
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Application #:
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15430931
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Filing Dt:
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02/13/2017
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Publication #:
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Pub Dt:
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06/15/2017
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Title:
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Vacuum System, in Particular EUV Lithography System, and Optical Element
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Assignee
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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EDELL, SHAPIRO & FINNAN, LLC
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9801 WASHINGTONIAN BOULEVARD
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SUITE 750
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GAITHERSBURG, MD 20878
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