Patent Assignment Details
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Reel/Frame: | 032691/0428 | |
| Pages: | 2 |
| | Recorded: | 04/16/2014 | | |
Attorney Dkt #: | 2012-0024-01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/23/2016
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Application #:
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14177057
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Filing Dt:
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02/10/2014
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Publication #:
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Pub Dt:
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08/13/2015
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Title:
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METHODS AND APPARATUS FOR LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Assignee
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P.O. BOX 324 |
VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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ASML NETHERLANDS B.V.
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P.O. BOX 324
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VELDHOVEN, 5500 AH NETHERLANDS
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