Patent Assignment Details
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| Reel/Frame: | 023416/0429 | |
| Pages: | 4 |
| | Recorded: | 10/23/2009 | | |
| Attorney Dkt #: | Q114211 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/22/2011
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Application #:
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12555620
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Filing Dt:
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09/08/2009
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Publication #:
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Pub Dt:
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02/11/2010
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Title:
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METHOD FOR CLEANING AN EUV LITHOGRAPHY DEVICE, METHOD FOR MEASURING THE RESIDUAL GAS ATMOSPHERE AND THE CONTAMINATION AND EUV LITHOGRAPHY DEVICE
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Assignee
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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SUGHRUE MION, PLLC
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2100 PENNSYLVANIA AVE NW
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SUITE 600
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WASHINGTON, DC 20037
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