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Patent Assignment Details
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Reel/Frame:011923/0431   Pages: 5
Recorded: 06/22/2001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/22/2001
Application #:
09387370
Filing Dt:
08/31/1999
Title:
SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS
Assignor
1
Exec Dt:
01/25/2001
Assignee
1
35 CABOT ROAD
WOBURN, MASSACHUSETTS 01801
Correspondence name and address
TESTA, HURWITZ & THIBEAULT, LLP
JAMIE H. ROSE
PATENT ADMINISTRATOR
125 HIGH STREET - HIGH STREET TOWER
BOSTON, MA 02110

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