Patent Assignment Details
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| Reel/Frame: | 020293/0431 | |
| Pages: | 3 |
| | Recorded: | 12/27/2007 | | |
| Attorney Dkt #: | 30205/43481 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/10/2009
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Application #:
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11964988
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Filing Dt:
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12/27/2007
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Publication #:
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Pub Dt:
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11/06/2008
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Title:
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FORMING FINE PATTERN OF SEMICONDUCTOR DEVICE USING THREE MASK LAYERS AND CMP OF SPIN-ON CARBON LAYER
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Assignee
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| SAN 136-1, AMI-RI, BUBAL-EUP |
| ICHEON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 467-701 |
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Correspondence name and address
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MARSHALL, GERSTEIN & BORUN LLP
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233 S. WACKER DRIVE, SUITE 6300
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CHICAGO, IL 60606-6357
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