Patent Assignment Details
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Reel/Frame: | 042921/0434 | |
| Pages: | 6 |
| | Recorded: | 06/20/2017 | | |
Attorney Dkt #: | 24548-0047007 |
Conveyance: | MODIFYING CONVERSION |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/05/2019
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Application #:
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15627816
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Filing Dt:
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06/20/2017
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Publication #:
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Pub Dt:
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01/25/2018
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Title:
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METHOD FOR OPERATING AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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Assignee
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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KA-LO YEH
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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