Patent Assignment Details
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Reel/Frame: | 010297/0436 | |
| Pages: | 2 |
| | Recorded: | 09/28/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09407628
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Filing Dt:
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09/28/1999
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Title:
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REMOVAL OF CMP RESIDUE FROM SEMICONDUCTORS USING SUPERCRITICAL CARBON DIOXIDE PROCESS
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Assignee
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4160A TECH DRIVE |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HAVERSTOCK & OWENS LLP
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THOMES B. HAVERSTOCK
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260 SHERIDAN AVE, STE. 420
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PALO ALTO, CA 94306
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