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Patent Assignment Details
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Reel/Frame:018711/0438   Pages: 5
Recorded: 01/05/2007
Attorney Dkt #:130429.00027
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 3
1
Patent #:
Issue Dt:
08/08/2006
Application #:
10665980
Filing Dt:
09/19/2003
Publication #:
Pub Dt:
04/21/2005
Title:
CONTROL OF OVERLAY REGISTRATION
2
Patent #:
NONE
Issue Dt:
Application #:
10831768
Filing Dt:
04/23/2004
Publication #:
Pub Dt:
11/13/2008
Title:
Critical dimension estimation
3
Patent #:
Issue Dt:
03/10/2009
Application #:
11233527
Filing Dt:
09/21/2005
Title:
OBSERVABILITY IN METROLOGY MEASUREMENTS
Assignor
1
Exec Dt:
11/28/2006
Assignee
1
C/O ASML US, INC.
8555 SOUTH RIVER PARKWAY
TEMPE, ARIZONA 85284
Correspondence name and address
ROBERT D. ATKINS
QUARLES & BRADY LLP
TWO NORTH CENTRAL AVENUE
PHOENIX, AZ 85005

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