Patent Assignment Details
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Reel/Frame: | 035881/0443 | |
| Pages: | 4 |
| | Recorded: | 06/23/2015 | | |
Attorney Dkt #: | KLAP133US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/22/2016
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Application #:
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14180107
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Filing Dt:
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02/13/2014
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Publication #:
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Pub Dt:
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09/04/2014
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Title:
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EUV LIGHT SOURCE USING CRYOGENIC DROPLET TARGETS IN MASK INSPECTION
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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ROBERT P. SIMPSON
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5555 MAIN STREET
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SIMPSON & SIMPSON, PLLC
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WILLIAMSVILLE, NY 14221
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