Patent Assignment Details
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Reel/Frame: | 014654/0453 | |
| Pages: | 2 |
| | Recorded: | 10/29/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/22/2005
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Application #:
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10600490
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Filing Dt:
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06/20/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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PHASE SHIFT MASK, AND EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD USING THE SAME
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Assignee
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3-30-2, SHIMOMARUKO, OHTA-KU |
TOKYO, JAPAN |
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Correspondence name and address
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MORGAN & FINNEGAN LLP
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JOSEPH A. CALVARUSO
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345 PARK AVENUE
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NEW YORK, NEW YORK 10154
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