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Total properties:
25
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09616859
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Filing Dt:
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07/14/2000
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Title:
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Chemically amplified resist composition containing norbornane type low molecular additive
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09759825
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Filing Dt:
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01/12/2001
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Publication #:
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Pub Dt:
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11/15/2001
| | | | |
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Title:
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CHEMICALLY AMPLIFIED RESIST COMPOSITION CONTAINING LOW MOLECULAR WEIGHT ADDITIVES
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Patent #:
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Issue Dt:
|
10/28/2003
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Application #:
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10056124
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Filing Dt:
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01/24/2002
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Publication #:
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Pub Dt:
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10/24/2002
| | | | |
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Title:
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NOVEL ACID-LABILE POLYMER AND RESIST COMPOSITION
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10073693
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Filing Dt:
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02/11/2002
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Publication #:
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Pub Dt:
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11/28/2002
| | | | |
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Title:
|
POLYMER FOR CHEMICALLY AMPLIFIED RESIST AND CHEMICALLY AMPLIFIED RESIST COMPOSITION CONTAINING THE SAME
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Patent #:
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Issue Dt:
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01/17/2006
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Application #:
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10421490
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Filing Dt:
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04/22/2003
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Publication #:
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Pub Dt:
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11/20/2003
| | | | |
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Title:
|
ACID GENERATOR AND THIN FILM COMPOSITION CONTAINING THE SAME
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Patent #:
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Issue Dt:
|
10/23/2007
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Application #:
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10940469
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Filing Dt:
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09/14/2004
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Publication #:
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Pub Dt:
|
07/14/2005
| | | | |
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Title:
|
NOVEL POLYMER AND CHEMICALLY AMPLIFIED RESIST COMPOSITION CONTAINING THE SAME
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Patent #:
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Issue Dt:
|
02/05/2008
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Application #:
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11108397
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Filing Dt:
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04/18/2005
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Publication #:
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Pub Dt:
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03/16/2006
| | | | |
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Title:
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COPOLYMER OF ALICYCLIC OLEFIN HAVING SECONDARY HYDROXYL GROUP AND ACRYL COMPOUND, AND CHEMICALLY AMPLIFIED RESIST COMPOSITION CONTAINING THE SAME
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Patent #:
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Issue Dt:
|
05/10/2011
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Application #:
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12157819
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Filing Dt:
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06/13/2008
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Publication #:
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Pub Dt:
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10/15/2009
| | | | |
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Title:
|
LIGHT ABSORBENT AND ORGANIC ANTIREFLECTION COATING COMPOSITION CONTAINING THE SAME
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Patent #:
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Issue Dt:
|
07/15/2014
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Application #:
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12214429
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Filing Dt:
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06/19/2008
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Publication #:
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Pub Dt:
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09/17/2009
| | | | |
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Title:
|
ACID GENERATING AGENT FOR CHEMICALLY AMPLIFIED RESIST COMPOSITIONS
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|
|
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Patent #:
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Issue Dt:
|
09/20/2011
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Application #:
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12214430
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Filing Dt:
|
06/19/2008
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Publication #:
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Pub Dt:
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12/25/2008
| | | | |
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Title:
|
COPOLYMER AND COMPOSITION FOR ORGANIC AND ANTIREFLECTIVE LAYER
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|
|
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Patent #:
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Issue Dt:
|
08/14/2012
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Application #:
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12231814
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Filing Dt:
|
09/05/2008
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|
Publication #:
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Pub Dt:
|
11/26/2009
| | | | |
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Title:
|
ACID GENERATING AGENT FOR CHEMICALLY AMPLIFIED RESIST COMPOSITIONS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/17/2012
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Application #:
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12321111
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Filing Dt:
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01/15/2009
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Publication #:
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Pub Dt:
|
03/25/2010
| | | | |
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Title:
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ONIUM SALT COMPOUND, POLYMER COMPOUND COMPRISING THE SALT COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION COMPRISING THE POLYMER COMPOUND, AND METHOD FOR PATTERNING USING THE COMPOSITION
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|
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Patent #:
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|
Issue Dt:
|
09/27/2011
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Application #:
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12384191
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Filing Dt:
|
04/01/2009
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|
Publication #:
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Pub Dt:
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05/06/2010
| | | | |
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Title:
|
PHOTOACID GENERATOR CONTAINING AROMATIC RING
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|
|
|
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Patent #:
|
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Issue Dt:
|
10/09/2012
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Application #:
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12416988
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Filing Dt:
|
04/02/2009
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Publication #:
|
|
Pub Dt:
|
06/10/2010
| | | | |
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Title:
|
PHOTOACID GENERATOR, COPOLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND METHOD OF FORMING PATTERN USING THE CHEMICALLY AMPLIFIED RESIST COMPOSITION
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|
|
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Patent #:
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|
Issue Dt:
|
01/22/2013
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Application #:
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13186101
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Filing Dt:
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07/19/2011
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Publication #:
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Pub Dt:
|
11/10/2011
| | | | |
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Title:
|
ORGANIC ANTI-REFLECTIVE LAYER COMPOSITION CONTAINING RING-OPENED PHTHALIC ANHYDRIDE AND METHOD FOR PREPARATION THEREOF
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|
|
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Patent #:
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|
Issue Dt:
|
10/07/2014
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Application #:
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13330971
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Filing Dt:
|
12/20/2011
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|
Publication #:
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Pub Dt:
|
06/28/2012
| | | | |
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Title:
|
POLYMER, METHOD FOR PRODUCING THE SAME, AND RESIST COMPOSITION CONTAINING THE SAME
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/21/2014
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Application #:
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13341102
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Filing Dt:
|
12/30/2011
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Publication #:
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Pub Dt:
|
07/05/2012
| | | | |
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Title:
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SULFONIUM COMPOUND, PHOTO-ACID GENERATOR, AND METHOD FOR MANUFACTURING THE SAME
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/18/2014
|
Application #:
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13367762
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Filing Dt:
|
02/07/2012
|
|
Publication #:
|
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Pub Dt:
|
08/09/2012
| | | | |
|
Title:
|
PHOTOACID GENERATOR, METHOD FOR PRODUCING THE SAME, AND RESIST COMPOSITION COMPRISING THE SAME
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/31/2013
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Application #:
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13367896
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Filing Dt:
|
02/07/2012
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|
Publication #:
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Pub Dt:
|
08/09/2012
| | | | |
|
Title:
|
PHOTOACID GENERATOR, METHOD FOR PRODUCING THE SAME, AND RESIST COMPOSITION COMPRISING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/02/2014
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Application #:
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13456777
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Filing Dt:
|
04/26/2012
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|
Publication #:
|
|
Pub Dt:
|
11/22/2012
| | | | |
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Title:
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COPOLYMER FOR ORGANIC ANTIREFLECTIVE FILM, MONOMER, AND COMPOSITION COMPRISING THE COPOLYMER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/07/2014
|
Application #:
|
13557893
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Filing Dt:
|
07/25/2012
|
|
Publication #:
|
|
Pub Dt:
|
02/07/2013
| | | | |
|
Title:
|
SULFONIUM COMPOUND, PHOTOACID GENERATOR, AND RESIST COMPOSITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/10/2014
|
Application #:
|
13652097
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Filing Dt:
|
10/15/2012
|
|
Publication #:
|
|
Pub Dt:
|
07/04/2013
| | | | |
|
Title:
|
ORGANIC ANTI REFLECTIVE LAYER COMPOSITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/26/2016
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Application #:
|
13713779
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Filing Dt:
|
12/13/2012
|
|
Publication #:
|
|
Pub Dt:
|
07/04/2013
| | | | |
|
Title:
|
ADDITIVE FOR RESIST AND RESIST COMPOSITION COMPRISING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/2015
|
Application #:
|
13713961
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Filing Dt:
|
12/13/2012
|
|
Publication #:
|
|
Pub Dt:
|
07/11/2013
| | | | |
|
Title:
|
HYDROPHILIC PHOTOACID GENERATOR AND RESIST COMPOSITION COMPRISING SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/23/2015
|
Application #:
|
13714154
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Filing Dt:
|
12/13/2012
|
|
Publication #:
|
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Pub Dt:
|
07/04/2013
| | | | |
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Title:
|
ADDITIVE FOR RESIST AND RESIST COMPOSITION COMPRISING SAME
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