Patent Assignment Details
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Reel/Frame: | 054668/0459 | |
| Pages: | 4 |
| | Recorded: | 12/16/2020 | | |
Attorney Dkt #: | MAPS-57994US2 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/02/2022
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Application #:
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17123402
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Filing Dt:
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12/16/2020
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Publication #:
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Pub Dt:
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04/08/2021
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Title:
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METHOD OF ETCHING SILICON CONTAINING FILMS SELECTIVELY AGAINST EACH OTHER
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Assignee
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3-1, AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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PEARNE & GORDON LLP
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1801 EAST 9TH STREET
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SUITE 1200
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CLEVELAND, OH 44114-3108
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