Patent Assignment Details
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| Reel/Frame: | 030290/0460 | |
| Pages: | 4 |
| | Recorded: | 04/25/2013 | | |
| Attorney Dkt #: | 10656.0005 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/16/2019
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Application #:
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13881593
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Filing Dt:
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04/25/2013
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Publication #:
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Pub Dt:
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08/22/2013
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Title:
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INSPECTION APPARATUS, INSPECTION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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| 12-1, YURAKUCHO 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT &
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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