Total properties:
13
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09208954
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Filing Dt:
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12/08/1998
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Publication #:
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Pub Dt:
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11/08/2001
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Title:
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OPTICAL RADIATION MEASUREMENT APPARATUS
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09208955
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Filing Dt:
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12/08/1998
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Title:
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METHOD OF MEASURING ELECTROMAGNETIC RADIATION
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09209735
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Filing Dt:
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12/11/1998
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Title:
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GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SYSTEM
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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09671827
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Filing Dt:
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09/27/2000
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Title:
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METHOD OF PRODUCING A SEMICONDUCTOR SURFACE COVERED WITH FLUORINE
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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09700577
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Filing Dt:
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11/13/2000
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Title:
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METHOD AND APPARATUS DEVICE FOR THE HEAT TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09744880
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Filing Dt:
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04/19/2001
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Title:
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METHOD AND APPARATUS FOR CALIBRATING TEMPERATURE MEASUREMENTS INDEPENDENT OF EMISSIVITY
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09789942
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Filing Dt:
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02/16/2001
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Publication #:
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Pub Dt:
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08/02/2001
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Title:
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Method of measuring electromagnetic radiation
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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09913269
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Filing Dt:
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11/16/2001
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Title:
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DEVICE AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09979646
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Filing Dt:
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12/13/2001
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Title:
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Apparatus and Method for the Thermal Treatment of Substrates
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10111737
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Filing Dt:
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09/17/2002
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Title:
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METHOD AND APPARATUS FOR THE THERMAL TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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10/11/2005
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Application #:
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10182594
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Filing Dt:
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07/28/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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DEVICE FOR THERMAL TREATMENT OF SUBSTRATES
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10220001
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Filing Dt:
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09/25/2002
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Publication #:
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Pub Dt:
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08/21/2003
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Title:
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METHOD FOR THE REMOVING OF ADSORBED MOLECULES FROM A CHAMBER
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Patent #:
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Issue Dt:
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05/05/2009
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Application #:
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11021915
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Filing Dt:
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12/22/2004
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Publication #:
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Pub Dt:
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02/09/2006
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Title:
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APPARATUS AND METHOD FOR MEASURING THE TEMPERATURE OF SUBSTRATES
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