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Total properties:
28
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Patent #:
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|
Issue Dt:
|
05/12/1987
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Application #:
|
06757954
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Filing Dt:
|
07/23/1985
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Title:
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METHOD FOR ETCHING A SILICON SUBSTRATE
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Patent #:
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|
Issue Dt:
|
01/21/1992
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Application #:
|
07415712
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Filing Dt:
|
10/02/1989
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Title:
|
SEMICONDUCTOR SENSOR
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/07/1995
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Application #:
|
07928293
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Filing Dt:
|
08/12/1992
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Title:
|
ACCELERATION SENSING DEVICE HAVING NEGATIVE FEEDBACK LOOP
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|
|
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Patent #:
|
|
Issue Dt:
|
02/20/1996
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Application #:
|
07940516
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Filing Dt:
|
09/04/1992
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|
Title:
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EQUIPMENT USING A MICRO-ACTUATOR
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|
|
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Patent #:
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|
Issue Dt:
|
06/27/1995
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Application #:
|
08052272
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Filing Dt:
|
04/20/1993
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|
Title:
|
MICROMOTION MECHANICAL STRUCTURE AND A PROCESS FOR THE PRODUCTION THEREOF
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|
|
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Patent #:
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|
Issue Dt:
|
07/11/1995
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Application #:
|
08168386
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Filing Dt:
|
12/17/1993
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|
Title:
|
SEMICONDUCTOR SENSOR WITH NESTED WEIGHT PORTIONS FOR CONVERTING PHYSICAL QUANTITY INTO TWISTING STRAINS
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|
|
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Patent #:
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|
Issue Dt:
|
05/21/1996
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Application #:
|
08202498
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Filing Dt:
|
02/28/1994
|
|
Title:
|
MICROSHUTTER HORIZONTALLY MOVABLE BY ELECTROSTATIC REPULSION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/10/1996
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Application #:
|
08409990
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Filing Dt:
|
03/24/1995
|
|
Title:
|
A PROCESS FOR THE PRODUCING A MICROMOTION MECHANICAL STRUCTURE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/05/1998
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Application #:
|
08541266
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Filing Dt:
|
10/12/1995
|
|
Title:
|
CAPACITANCE TYPE ACCELERATION SENSOR
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/27/1997
|
Application #:
|
08563486
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Filing Dt:
|
11/28/1995
|
|
Title:
|
DIFFERENTIAL TYPE CAPACITIVE SENSOR SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/1998
|
Application #:
|
08824610
|
Filing Dt:
|
03/27/1997
|
|
Title:
|
VACUUM MICRODEVICE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/20/1999
|
Application #:
|
08824745
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Filing Dt:
|
03/26/1997
|
|
Title:
|
VACUUM MICRODEVICE AND METHOD OF MANUFACTURING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/20/2001
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Application #:
|
09075265
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Filing Dt:
|
05/11/1998
|
|
Title:
|
MICROACTUATOR AND METHOD OF MANUFACTURING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/23/2001
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Application #:
|
09082151
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Filing Dt:
|
05/21/1998
|
|
Title:
|
MICROACTUATOR AND METHOD OF MANUFACTURING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/1999
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Application #:
|
09086601
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Filing Dt:
|
05/29/1998
|
|
Title:
|
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE.
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|
|
|
|
Patent #:
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|
Issue Dt:
|
09/28/1999
|
Application #:
|
09123521
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Filing Dt:
|
07/28/1998
|
|
Title:
|
LIGHT BEAM SCANNER USING LARGE ELECTROSTATIC FORCE
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|
|
|
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Patent #:
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|
Issue Dt:
|
07/25/2000
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Application #:
|
09286462
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Filing Dt:
|
04/06/1999
|
|
Title:
|
VACUUM MICRODEVICE AND METHOD OF MANUFACTURING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/24/2001
|
Application #:
|
09317638
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Filing Dt:
|
05/25/1999
|
|
Title:
|
SEMICONDUCTOR MICROACTUATOR WITH AN IMPROVED PLATFORM STRUCTURE AND METHOD OF FORMING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/27/2001
|
Application #:
|
09317639
|
Filing Dt:
|
05/25/1999
|
|
Title:
|
MICROACTUATOR WITH AN IMPROVED SEMICONDUCTOR SUBSTRATE AND METHOD OF FORMING THE SAME
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/30/2002
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Application #:
|
09329907
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Filing Dt:
|
06/10/1999
|
|
Title:
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METHOD FOR FABRICATING A MASK FOR A LIGA PROCESS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
05/20/2003
|
Application #:
|
09868575
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Filing Dt:
|
06/20/2001
|
|
Title:
|
MICROMACHINE SWITCH AND ITS PRODUCTION METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/28/2003
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Application #:
|
09934844
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Filing Dt:
|
08/23/2001
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|
Publication #:
|
|
Pub Dt:
|
03/07/2002
| | | | |
|
Title:
|
MICROSWITCH AND METHOD OF FABRICATING A MICROSWITCH WITH A CANTILEVERED ARM
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|
|
|
|
Patent #:
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|
Issue Dt:
|
09/28/2004
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Application #:
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10189410
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Filing Dt:
|
07/08/2002
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|
Publication #:
|
|
Pub Dt:
|
03/27/2003
| | | | |
|
Title:
|
OPTICAL SWITCHING SYSTEM AND OPTICAL SWITCHING METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2004
|
Application #:
|
10195741
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Filing Dt:
|
07/16/2002
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|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
|
Title:
|
OPTICAL SWITCH
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/24/2004
|
Application #:
|
10215912
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Filing Dt:
|
08/09/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/20/2003
| | | | |
|
Title:
|
FUNCTIONAL DEVICE, METHOD OF MANUFACTURING THEREFOR AND DRIVER CIRCUIT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2004
|
Application #:
|
10279192
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Filing Dt:
|
10/23/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/24/2003
| | | | |
|
Title:
|
ELECTROSTATIC ACTUATOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/2004
|
Application #:
|
10452724
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Filing Dt:
|
06/03/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/15/2004
| | | | |
|
Title:
|
TUNABLE FILTER, MANUFACTURING METHOD THEREOF AND OPTICAL SWITCHING DEVICE COMPRISING THE TUNABLE FILTER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/2004
|
Application #:
|
10653810
|
Filing Dt:
|
09/03/2003
|
|
Publication #:
|
|
Pub Dt:
|
03/04/2004
| | | | |
|
Title:
|
METHOD OF MANUFACTURING FOR A FUNCTIONAL DEVICE THERFOR AND DRIVER CIRCUIT
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|
