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Patent #:
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Issue Dt:
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10/30/2007
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Application #:
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10753138
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Filing Dt:
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01/07/2004
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Publication #:
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Pub Dt:
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07/07/2005
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Title:
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CHEMICAL-MECHANICAL POLISHING OF METALS IN AN OXIDIZED FORM
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Patent #:
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Issue Dt:
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08/14/2007
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Application #:
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10755154
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Filing Dt:
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01/09/2004
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Publication #:
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Pub Dt:
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07/14/2005
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Title:
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POLISHING SYSTEM COMPRISING A HIGHLY BRANCHED POLYMER
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Patent #:
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Issue Dt:
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06/13/2006
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Application #:
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10807079
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Filing Dt:
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03/23/2004
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Publication #:
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Pub Dt:
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09/29/2005
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Title:
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LOW SURFACE ENERGY CMP PAD
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Patent #:
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Issue Dt:
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09/16/2008
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Application #:
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10810070
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Filing Dt:
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03/25/2004
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Publication #:
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Pub Dt:
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01/13/2005
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Title:
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CUSTOMIZED POLISH PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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10869397
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Filing Dt:
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06/16/2004
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Publication #:
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Pub Dt:
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12/22/2005
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Title:
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METHOD OF POLISHING A TUNGSTEN-CONTAINING SUBSTRATE
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Patent #:
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Issue Dt:
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05/27/2008
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Application #:
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10897192
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Filing Dt:
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07/21/2004
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Publication #:
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Pub Dt:
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01/26/2006
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Title:
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METHODS FOR PRODUCING IN-SITU GROOVES IN CHEMICAL MECHANICAL PLANARIZATION (CMP) PADS, AND NOVEL CMP PAD DESIGNS
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Patent #:
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Issue Dt:
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01/09/2007
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Application #:
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10901420
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Filing Dt:
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07/28/2004
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Publication #:
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Pub Dt:
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02/02/2006
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Title:
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POLISHING COMPOSITION FOR NOBLE METALS
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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10931908
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Filing Dt:
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09/01/2004
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Publication #:
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Pub Dt:
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03/02/2006
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Title:
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POLISHING PAD WITH MICROPOROUS REGIONS
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Patent #:
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Issue Dt:
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10/18/2011
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Application #:
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10974460
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Filing Dt:
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10/27/2004
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Publication #:
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Pub Dt:
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04/27/2006
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Title:
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METAL ION-CONTAINING CMP COMPOSITION AND METHOD FOR USING THE SAME
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Patent #:
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Issue Dt:
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03/17/2009
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Application #:
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10982486
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Filing Dt:
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11/05/2004
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Publication #:
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Pub Dt:
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05/11/2006
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Title:
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POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
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Patent #:
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Issue Dt:
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12/25/2007
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Application #:
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11093806
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Filing Dt:
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03/30/2005
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Publication #:
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Pub Dt:
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10/12/2006
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Title:
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POLYMERIC INHIBITORS FOR ENHANCED PLANARIZATION
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Patent #:
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Issue Dt:
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06/07/2011
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Application #:
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11241137
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Filing Dt:
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09/30/2005
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Publication #:
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Pub Dt:
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04/05/2007
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Title:
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COMPOSITION AND METHOD FOR PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11251547
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Filing Dt:
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10/14/2005
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Publication #:
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Pub Dt:
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12/07/2006
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Title:
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CUSTOMIZED POLISHING PADS FOR CMP AND METHODS OF FABRICATION AND USE THEREOF
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Patent #:
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Issue Dt:
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09/04/2007
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Application #:
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11259645
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Filing Dt:
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10/26/2005
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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CMP OF COPPER/RUTHENIUM SUBSTRATES
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Patent #:
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Issue Dt:
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05/12/2009
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Application #:
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11294853
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Filing Dt:
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12/06/2005
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
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Patent #:
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Issue Dt:
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09/08/2009
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Application #:
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11412369
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Filing Dt:
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04/27/2006
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Publication #:
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Pub Dt:
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11/01/2007
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Title:
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POLISHING COMPOSITION CONTAINING POLYETHER AMINE
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Patent #:
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Issue Dt:
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06/24/2014
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Application #:
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11448205
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Filing Dt:
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06/07/2006
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Publication #:
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Pub Dt:
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12/27/2007
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Title:
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Compositions and methods for polishing silicon nitride materials
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Patent #:
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Issue Dt:
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11/13/2007
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Application #:
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11478023
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Filing Dt:
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06/29/2006
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Title:
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TUNABLE SELECTIVITY SLURRIES IN CMP APPLICATIONS
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Patent #:
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Issue Dt:
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09/08/2015
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Application #:
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11517909
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Filing Dt:
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09/08/2006
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Publication #:
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Pub Dt:
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03/13/2008
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Title:
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Onium-containing CMP compositions and methods of use thereof
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Patent #:
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Issue Dt:
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11/25/2008
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Application #:
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11595536
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Filing Dt:
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11/09/2006
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Publication #:
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Pub Dt:
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05/15/2008
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Title:
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COMPOSITIONS AND METHODS FOR CMP OF LOW-K-DIELECTRIC MATERIALS
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Patent #:
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Issue Dt:
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05/17/2016
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Application #:
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11634576
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Filing Dt:
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12/06/2006
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Publication #:
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Pub Dt:
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06/12/2008
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Title:
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COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES
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Patent #:
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Issue Dt:
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09/01/2009
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Application #:
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11670137
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Filing Dt:
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02/01/2007
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Publication #:
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Pub Dt:
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09/20/2007
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Title:
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POLISHING COMPOSITION FOR A TUNGSTEN-CONTAINING SUBSTRATE
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Patent #:
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Issue Dt:
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08/17/2010
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Application #:
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11673518
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Filing Dt:
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02/09/2007
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Publication #:
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Pub Dt:
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03/06/2008
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Title:
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CMP SYSTEM UTILIZING HALOGEN ADDUCT
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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11699129
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Filing Dt:
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01/29/2007
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Publication #:
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Pub Dt:
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08/02/2007
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Title:
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COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS
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Patent #:
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Issue Dt:
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05/06/2014
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Application #:
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11884829
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Filing Dt:
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10/16/2008
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Publication #:
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Pub Dt:
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02/26/2009
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Title:
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Customized Polishing Pads for CMP and Methods of Fabrication and Use Thereof
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Patent #:
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Issue Dt:
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06/07/2011
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Application #:
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11986921
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Filing Dt:
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11/27/2007
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Publication #:
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Pub Dt:
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05/28/2009
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Title:
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COPPER-PASSIVATING CMP COMPOSITIONS AND METHODS
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11998196
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Filing Dt:
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11/28/2007
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Publication #:
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Pub Dt:
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04/17/2008
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Title:
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CUSTOMIZED POLISH PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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10/16/2012
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Application #:
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11998212
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Filing Dt:
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11/28/2007
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Publication #:
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Pub Dt:
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09/04/2008
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Title:
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METHODS FOR PRODUCING IN-SITU GROOVES IN CHEMICAL MECHANICAL PLANARIZATION (CMP) PADS, AND NOVEL CMP PAD DESIGNS
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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12043010
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Filing Dt:
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03/05/2008
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Publication #:
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Pub Dt:
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06/26/2008
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Title:
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SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS
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Patent #:
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Issue Dt:
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04/23/2013
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12052970
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03/21/2008
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Pub Dt:
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09/24/2009
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Title:
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COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES
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09/13/2011
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12126739
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05/23/2008
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Pub Dt:
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11/26/2009
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Title:
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STABLE, HIGH RATE SILICON SLURRY
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08/21/2012
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12170954
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07/10/2008
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Pub Dt:
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01/14/2010
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Title:
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METHOD OF POLISHING NICKEL-PHOSPHOROUS
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Patent #:
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08/21/2012
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12221023
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07/30/2008
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Pub Dt:
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02/04/2010
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Title:
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METHODS AND COMPOSITIONS FOR POLISHING SILICON-CONTAINING SUBSTRATES
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08/09/2011
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12234173
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09/19/2008
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Pub Dt:
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03/26/2009
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Title:
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POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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12234237
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Filing Dt:
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09/19/2008
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Publication #:
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Pub Dt:
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03/26/2009
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Title:
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POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE
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Patent #:
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Issue Dt:
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07/07/2015
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Application #:
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12309212
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Filing Dt:
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01/09/2009
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Pub Dt:
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12/24/2009
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Title:
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CMP method for metal-containing substrates
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12/07/2010
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Application #:
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12364253
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02/02/2009
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Publication #:
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Pub Dt:
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05/28/2009
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Title:
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POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
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Patent #:
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Issue Dt:
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07/24/2012
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12364937
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02/03/2009
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Publication #:
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Pub Dt:
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08/05/2010
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Title:
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POLISHING COMPOSITION FOR NICKEL-PHOSPHOROUS MEMORY DISKS
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Patent #:
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Issue Dt:
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11/10/2015
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Application #:
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12381709
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Filing Dt:
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03/16/2009
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Publication #:
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Pub Dt:
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12/17/2009
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Title:
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Grooved CMP pad
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Patent #:
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Issue Dt:
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03/20/2012
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12384266
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04/02/2009
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Publication #:
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Pub Dt:
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08/27/2009
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Title:
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POLISHING COMPOSITION AND METHOD FOR HIGH SILICON NITRIDE TO SILICON OXIDE REMOVAL RATE RATIOS
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Patent #:
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Issue Dt:
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05/03/2016
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12455631
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06/04/2009
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Pub Dt:
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12/09/2010
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Title:
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Polishing composition for nickel-phosphorous memory disks
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02/26/2013
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12456546
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06/18/2009
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Pub Dt:
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12/24/2009
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Title:
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POLISHING SYSTEMS
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06/03/2014
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12462067
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07/29/2009
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Pub Dt:
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11/26/2009
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Title:
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POLISHING COMPOSITION CONTAINING POLYETHER AMINE
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11/11/2014
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12462638
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09/16/2009
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03/17/2011
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Title:
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COMPOSITION AND METHOD FOR POLISHING BULK SILICON
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08/28/2012
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12584343
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09/03/2009
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Pub Dt:
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03/25/2010
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Title:
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BARRIER SLURRY FOR LOW-K DIELECTRICS
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01/17/2017
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12630288
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12/03/2009
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Pub Dt:
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06/10/2010
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Title:
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METHOD TO SELECTIVELY POLISH SILICON CARBIDE FILMS
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04/28/2015
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12657135
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01/13/2010
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07/14/2011
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Title:
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CMP pad with local area transparency
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04/24/2018
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12761016
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04/15/2010
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Pub Dt:
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10/28/2010
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Title:
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CMP POROUS PAD WITH PARTICLES IN A POLYMERIC MATRIX
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08/26/2014
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12762180
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04/16/2010
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Publication #:
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Pub Dt:
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03/17/2011
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Title:
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COMPOSITION AND METHOD FOR POLISHING BULK SILICON
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Patent #:
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Issue Dt:
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07/30/2013
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12764268
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Filing Dt:
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04/21/2010
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Publication #:
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Pub Dt:
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08/12/2010
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Title:
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OXIDATION-STABILIZED CMP COMPOSITIONS AND METHODS
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Patent #:
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Issue Dt:
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02/19/2013
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12767712
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Filing Dt:
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04/26/2010
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Publication #:
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Pub Dt:
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10/28/2010
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Title:
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CUSTOMIZED POLISH PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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09/25/2012
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12807324
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09/02/2010
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Publication #:
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Pub Dt:
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03/08/2012
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Title:
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SILICON POLISHING COMPOSITIONS WITH HIGH RATE AND LOW DEFECTIVITY
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10/13/2015
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12832908
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07/08/2010
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Publication #:
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Pub Dt:
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01/12/2012
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Title:
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SOFT POLISHING PAD FOR POLISHING A SEMICONDUCTOR SUBSTRATE
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Patent #:
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09/10/2013
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Application #:
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12854470
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08/11/2010
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Pub Dt:
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12/16/2010
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Title:
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COMPOSITIONS FOR CMP OF SEMICONDUCTOR MATERIALS
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01/14/2014
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12895465
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Filing Dt:
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09/30/2010
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Pub Dt:
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04/05/2012
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Title:
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POLISHING PAD FOR EDDY CURRENT END-POINT DETECTION
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02/25/2014
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12895479
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09/30/2010
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04/05/2012
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Title:
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HOMOGENEOUS POLISHING PAD FOR EDDY CURRENT END-POINT DETECTION
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05/14/2013
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12895529
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09/30/2010
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04/05/2012
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Title:
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METHOD OF FABRICATING A POLISHING PAD WITH AN END-POINT DETECTION REGION FOR EDDY CURRENT END-POINT DETECTION
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04/15/2014
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12971714
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12/17/2010
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06/09/2011
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04/22/2014
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12979123
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12/27/2010
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04/19/2012
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Title:
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POLISHING PAD WITH MULTI-MODAL DISTRIBUTION OF PORE DIAMETERS
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05/07/2013
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13004113
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01/11/2011
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05/05/2011
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METAL-PASSIVATING CMP COMPOSITIONS AND METHODS
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12/15/2015
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13014630
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01/26/2011
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Pub Dt:
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07/26/2012
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Title:
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POLISHING PAD WITH CONCENTRIC OR APPROXIMATELY CONCENTRIC POLYGON GROOVE PATTERN
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08/19/2014
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13087857
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04/15/2011
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10/18/2012
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Title:
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COMPOSITIONS AND METHODS FOR SELECTIVE POLISHING OF SILICON NITRIDE MATERIALS
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03/03/2015
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13101826
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05/05/2011
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11/08/2012
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Title:
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POLISHING PAD WITH ALIGNMENT FEATURE
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12/30/2014
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13184395
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07/15/2011
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01/17/2013
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Title:
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POLISHING PAD WITH ALIGNMENT APERTURE
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01/07/2014
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13237881
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09/20/2011
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03/21/2013
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COMPOSITION AND METHOD FOR POLISHING ALUMINUM SEMICONDUCTOR SUBSTRATES
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06/30/2015
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13306845
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11/29/2011
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05/30/2013
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POLISHING PAD WITH FOUNDATION LAYER AND POLISHING SURFACE LAYER
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06/30/2015
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13306849
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11/29/2011
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05/30/2013
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08/23/2016
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13351339
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01/17/2012
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07/26/2012
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04/08/2014
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13379911
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12/21/2011
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04/19/2012
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CMP COMPOSITIONS AND METHODS FOR SUPPRESSING POLYSILICON REMOVAL RATES
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10/13/2015
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13444620
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04/11/2012
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10/17/2013
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POLISHING PAD WITH LIGHT-STABLE LIGHT-TRANSMITTING REGION
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07/15/2014
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13477535
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05/22/2012
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11/28/2013
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CMP COMPOSITION CONTAINING ZIRCONIA PARTICLES AND METHOD OF USE
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05/26/2015
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13478292
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05/23/2012
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11/28/2013
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POLISHING COMPOSITION FOR NICKEL-PHOSPHOROUS-COATED MEMORY DISKS
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03/21/2017
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13488149
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06/04/2012
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12/05/2013
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10/15/2013
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07/11/2012
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11/01/2012
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04/25/2017
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07/11/2012
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01/16/2014
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12/03/2013
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07/20/2012
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11/08/2012
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08/27/2013
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08/27/2012
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POLISHING COMPOSITION CONTAINING HYBRID ABRASIVE FOR NICKEL-PHOSPHOROUS COATED MEMORY DISKS
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09/02/2014
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09/07/2012
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03/13/2014
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POLYPYRROLIDONE POLISHING COMPOSITION AND METHOD
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01/13/2015
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13612135
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09/12/2012
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03/07/2013
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05/16/2017
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01/22/2013
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07/24/2014
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12/30/2014
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01/30/2013
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07/31/2014
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03/01/2016
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02/01/2013
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06/13/2013
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06/07/2016
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03/04/2013
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09/04/2014
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12/23/2014
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03/13/2013
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09/19/2013
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01/19/2016
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03/13/2013
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09/19/2013
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12/25/2018
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03/14/2013
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09/18/2014
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02/24/2015
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03/15/2013
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09/18/2014
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01/07/2014
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03/18/2013
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08/29/2013
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12/09/2014
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05/21/2013
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11/27/2014
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04/05/2016
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07/22/2013
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01/22/2015
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09/06/2016
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09/24/2013
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03/26/2015
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03/08/2016
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10/10/2013
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04/16/2015
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03/08/2016
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04/16/2015
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05/17/2016
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10/10/2013
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04/16/2015
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07/23/2019
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12/03/2013
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06/04/2015
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CMP COMPOSITIONS AND METHODS FOR POLISHING NICKEL PHOSPHOROUS SURFACES
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05/12/2015
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12/06/2013
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04/17/2014
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12/26/2017
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12/09/2013
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06/11/2015
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03/21/2017
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03/06/2018
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01/15/2014
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07/16/2015
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01/31/2017
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02/19/2014
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06/19/2014
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POLISHING PAD WITH MULTI-MODAL DISTRIBUTION OF PORE DIAMETERS
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