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Reel/Frame:017810/0467   Pages: 4
Recorded: 06/16/2006
Attorney Dkt #:20228-010001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/23/2009
Application #:
11386236
Filing Dt:
03/21/2006
Publication #:
Pub Dt:
11/02/2006
Title:
PROCESS FOR CONNECTING AN OPTICAL ELEMENT OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS TO A MOUNT, AND ASSEMBLY
Assignors
1
Exec Dt:
05/16/2006
2
Exec Dt:
06/06/2006
3
Exec Dt:
05/19/2006
4
Exec Dt:
05/15/2006
Assignee
1
CARL-ZEISS-STRASSE 22
73447 OBERKOCHEN, GERMANY
Correspondence name and address
SEAN P. DALEY
FISH & RICHARDSON P.C.
225 FRANKLIN STREET
BOSTON, MA 02110

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