Patent Assignment Details
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| Reel/Frame: | 066420/0468 | |
| Pages: | 9 |
| | Recorded: | 02/08/2024 | | |
| Attorney Dkt #: | 23634US01CON |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18422013
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Filing Dt:
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01/25/2024
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Publication #:
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Pub Dt:
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05/16/2024
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Title:
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ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCHING PROGRAM, AND PLASMA PROCESSING APPARATUS
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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XSENSUS LLP
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100 DAINGERFIELD ROAD, SUITE 402
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ALEXANDRIA, VA 22314
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