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Reel/Frame:056064/0469   Pages: 3
Recorded: 04/28/2021
Attorney Dkt #:081468-0561054
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/14/2023
Application #:
17241142
Filing Dt:
04/27/2021
Publication #:
Pub Dt:
08/19/2021
Title:
METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHOD OF REDUCING ERROR IN MEASUREMENT DATA, METHOD OF CALIBRATING A METROLOGY PROCESS, METHOD OF SELECTING METROLOGY TARGETS
Assignors
1
Exec Dt:
12/06/2017
2
Exec Dt:
12/06/2017
3
Exec Dt:
12/06/2017
Assignee
1
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondence name and address
PILLSBURY WINTHROP SHAW PITTMAN, LLP
PO BOX 10500
MCLEAN, VA 22102

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