Total properties:
29
|
|
Patent #:
|
|
Issue Dt:
|
01/27/2015
|
Application #:
|
12644700
|
Filing Dt:
|
12/22/2009
|
Publication #:
|
|
Pub Dt:
|
06/24/2010
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2015
|
Application #:
|
13116793
|
Filing Dt:
|
05/26/2011
|
Publication #:
|
|
Pub Dt:
|
01/12/2012
| | | | |
Title:
|
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/23/2015
|
Application #:
|
13239529
|
Filing Dt:
|
09/22/2011
|
Publication #:
|
|
Pub Dt:
|
04/19/2012
| | | | |
Title:
|
METHOD OF AND APPARATUS FOR HEAT-TREATING EXPOSED SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/24/2015
|
Application #:
|
13270695
|
Filing Dt:
|
10/11/2011
|
Publication #:
|
|
Pub Dt:
|
02/09/2012
| | | | |
Title:
|
STOCKER APPARATUS AND SUBSTRATE TREATING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/2016
|
Application #:
|
13416830
|
Filing Dt:
|
03/09/2012
|
Publication #:
|
|
Pub Dt:
|
10/04/2012
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/29/2016
|
Application #:
|
13624536
|
Filing Dt:
|
09/21/2012
|
Publication #:
|
|
Pub Dt:
|
04/04/2013
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2016
|
Application #:
|
13633705
|
Filing Dt:
|
10/02/2012
|
Publication #:
|
|
Pub Dt:
|
04/11/2013
| | | | |
Title:
|
COATING METHOD AND COATING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/2017
|
Application #:
|
13633726
|
Filing Dt:
|
10/02/2012
|
Publication #:
|
|
Pub Dt:
|
04/11/2013
| | | | |
Title:
|
COATING METHOD AND COATING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2017
|
Application #:
|
13667281
|
Filing Dt:
|
11/02/2012
|
Publication #:
|
|
Pub Dt:
|
06/06/2013
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR PERFORMING HEAT TREATMENT ON SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2018
|
Application #:
|
13671069
|
Filing Dt:
|
11/07/2012
|
Publication #:
|
|
Pub Dt:
|
05/30/2013
| | | | |
Title:
|
CUP AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2016
|
Application #:
|
13721352
|
Filing Dt:
|
12/20/2012
|
Publication #:
|
|
Pub Dt:
|
10/03/2013
| | | | |
Title:
|
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SUBSTRATE CLEANING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/18/2017
|
Application #:
|
13756959
|
Filing Dt:
|
02/01/2013
|
Publication #:
|
|
Pub Dt:
|
10/03/2013
| | | | |
Title:
|
SUBSTRATE CLEANING APPARATUS FOR CLEANING A LOWER SURFACE OF A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/06/2015
|
Application #:
|
13845211
|
Filing Dt:
|
03/18/2013
|
Publication #:
|
|
Pub Dt:
|
10/03/2013
| | | | |
Title:
|
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXPOSING SUBSTRATE AND SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13892440
|
Filing Dt:
|
05/13/2013
|
Publication #:
|
|
Pub Dt:
|
11/28/2013
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/27/2018
|
Application #:
|
13895698
|
Filing Dt:
|
05/16/2013
|
Publication #:
|
|
Pub Dt:
|
11/28/2013
| | | | |
Title:
|
DEVELOPMENT PROCESSING DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
01/12/2016
|
Application #:
|
13920261
|
Filing Dt:
|
06/18/2013
|
Publication #:
|
|
Pub Dt:
|
03/06/2014
| | | | |
Title:
|
PROCESSING CUP AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/2016
|
Application #:
|
13943198
|
Filing Dt:
|
07/16/2013
|
Publication #:
|
|
Pub Dt:
|
01/23/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2017
|
Application #:
|
13944237
|
Filing Dt:
|
07/17/2013
|
Publication #:
|
|
Pub Dt:
|
01/23/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
10/11/2016
|
Application #:
|
13965501
|
Filing Dt:
|
08/13/2013
|
Publication #:
|
|
Pub Dt:
|
03/06/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/2017
|
Application #:
|
14022657
|
Filing Dt:
|
09/10/2013
|
Publication #:
|
|
Pub Dt:
|
03/13/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/14/2017
|
Application #:
|
14084067
|
Filing Dt:
|
11/19/2013
|
Publication #:
|
|
Pub Dt:
|
06/12/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2018
|
Application #:
|
14105791
|
Filing Dt:
|
12/13/2013
|
Publication #:
|
|
Pub Dt:
|
09/25/2014
| | | | |
Title:
|
SUBSTRATE TREATING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/19/2015
|
Application #:
|
14106215
|
Filing Dt:
|
12/13/2013
|
Publication #:
|
|
Pub Dt:
|
04/17/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
06/20/2017
|
Application #:
|
14132334
|
Filing Dt:
|
12/18/2013
|
Publication #:
|
|
Pub Dt:
|
07/17/2014
| | | | |
Title:
|
ALIGNMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/07/2014
|
Application #:
|
14132592
|
Filing Dt:
|
12/18/2013
|
Publication #:
|
|
Pub Dt:
|
04/17/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
06/23/2015
|
Application #:
|
14142048
|
Filing Dt:
|
12/27/2013
|
Publication #:
|
|
Pub Dt:
|
07/17/2014
| | | | |
Title:
|
NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14156848
|
Filing Dt:
|
01/16/2014
|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
Title:
|
SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/2016
|
Application #:
|
14322982
|
Filing Dt:
|
07/03/2014
|
Publication #:
|
|
Pub Dt:
|
01/15/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS WITH A CLEANING PROCESSING SECTION FOR CLEANING A CHEMICAL LIQUID PROCESSING SECTION
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
14452748
|
Filing Dt:
|
08/06/2014
|
Publication #:
|
|
Pub Dt:
|
11/20/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANSPORTING SUBSTRATE STORING CONTAINER
|
|