Total properties:
27
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Patent #:
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Issue Dt:
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07/02/2013
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Application #:
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12859672
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Filing Dt:
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08/19/2010
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Title:
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TRANSDUCER STRUCTURE AND METHOD FOR MEMS DEVICES
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Patent #:
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Issue Dt:
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10/28/2014
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Application #:
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13163672
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Filing Dt:
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06/18/2011
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Title:
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METHOD AND STRUCTURE OF AN INERTIAL SENSOR USING TILT CONVERSION
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Patent #:
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Issue Dt:
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03/01/2016
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Application #:
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13788503
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Filing Dt:
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03/07/2013
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Publication #:
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Pub Dt:
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09/12/2013
| | | | |
Title:
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METHODS AND STRUCTURES OF INTEGRATED MEMS-CMOS DEVICES
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Patent #:
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Issue Dt:
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06/28/2016
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Application #:
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13922539
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Filing Dt:
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06/20/2013
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Publication #:
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Pub Dt:
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08/27/2015
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Title:
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TRANSDUCER STRUCTURE AND METHOD FOR MEMS DEVICES
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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14158756
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Filing Dt:
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01/17/2014
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Publication #:
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Pub Dt:
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10/01/2015
| | | | |
Title:
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INTEGRATED MEMS INERTIAL SENSING DEVICE WITH AUTOMATIC GAIN CONTROL
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Patent #:
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Issue Dt:
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04/04/2017
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Application #:
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14158765
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Filing Dt:
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01/17/2014
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Publication #:
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Pub Dt:
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10/01/2015
| | | | |
Title:
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INTEGRATED INERTIAL SENSING DEVICE
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14160549
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Filing Dt:
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01/21/2014
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Publication #:
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Pub Dt:
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10/01/2015
| | | | |
Title:
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MULTI-AXIS INTEGRATED INERTIAL SENSING DEVICE
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Patent #:
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Issue Dt:
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11/20/2018
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Application #:
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14162718
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Filing Dt:
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01/23/2014
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Publication #:
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Pub Dt:
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10/23/2014
| | | | |
Title:
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MULTI-AXIS INTEGRATED MEMS INERTIAL SENSING DEVICE ON SINGLE PACKAGED CHIP
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Patent #:
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Issue Dt:
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07/31/2018
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Application #:
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14163789
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Filing Dt:
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01/24/2014
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Publication #:
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Pub Dt:
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10/23/2014
| | | | |
Title:
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MULTI-AXIS MEMS RATE SENSOR DEVICE
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Patent #:
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Issue Dt:
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05/16/2017
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Application #:
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14222575
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Filing Dt:
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03/21/2014
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Publication #:
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Pub Dt:
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10/02/2014
| | | | |
Title:
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WAFER LEVEL CENTRIFUGE FOR MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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09/12/2017
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Application #:
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14267864
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Filing Dt:
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05/01/2014
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Publication #:
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Pub Dt:
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10/08/2015
| | | | |
Title:
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CENTRIFUGE MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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06/11/2019
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Application #:
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14289494
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Filing Dt:
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05/28/2014
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Publication #:
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Pub Dt:
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12/04/2014
| | | | |
Title:
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CENTRIFUGE MEMS STICTION TEST SYSTEM AND METHOD
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|
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Patent #:
|
|
Issue Dt:
|
07/07/2015
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Application #:
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14297337
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Filing Dt:
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06/05/2014
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Publication #:
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|
Pub Dt:
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12/11/2014
| | | | |
Title:
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METHOD AND STRUCTURE OF AN INTEGRATED MEMS INERTIAL SENSOR DEVICE USING ELECTROSTATIC QUADRATURE-CANCELLATION
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Patent #:
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Issue Dt:
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08/14/2018
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Application #:
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14302385
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Filing Dt:
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06/11/2014
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Publication #:
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|
Pub Dt:
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12/18/2014
| | | | |
Title:
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MEMS STRUCTURE WITH IMPROVED SHIELDING AND METHOD
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|
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Patent #:
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Issue Dt:
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02/02/2016
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Application #:
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14521441
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Filing Dt:
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10/22/2014
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Publication #:
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|
Pub Dt:
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04/23/2015
| | | | |
Title:
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METHOD AND DEVICE OF MEMS PROCESS CONTROL MONITORING AND PACKAGED MEMS WITH DIFFERENT CAVITY PRESSURES
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|
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Patent #:
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|
Issue Dt:
|
06/28/2016
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Application #:
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14794722
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Filing Dt:
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07/08/2015
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Title:
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SYNCHRONOUS MODULATION RESONATOR WITH SIGMA DELTA MODULATOR
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Patent #:
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|
Issue Dt:
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01/22/2019
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Application #:
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14887622
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Filing Dt:
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10/20/2015
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Publication #:
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Pub Dt:
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02/11/2016
| | | | |
Title:
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METHOD TO PACKAGE MULTIPLE MEMS SENSORS AND ACTUATORS AT DIFFERENT GASES AND CAVITY PRESSURES
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Patent #:
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Issue Dt:
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08/08/2017
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Application #:
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14887631
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Filing Dt:
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10/20/2015
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Publication #:
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|
Pub Dt:
|
02/11/2016
| | | | |
Title:
|
METHOD TO PACKAGE MULTIPLE MEMS SENSORS AND ACTUATORS AT DIFFERENT GASES AND CAVITY PRESSURES
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|
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Patent #:
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|
Issue Dt:
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04/24/2018
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Application #:
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14930642
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Filing Dt:
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11/02/2015
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Publication #:
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|
Pub Dt:
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02/25/2016
| | | | |
Title:
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MEMS STRUCTURE WITH IMPROVED SHIELDING AND METHOD
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|
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Patent #:
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|
Issue Dt:
|
07/09/2019
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Application #:
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14977481
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Filing Dt:
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12/21/2015
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Publication #:
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|
Pub Dt:
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04/21/2016
| | | | |
Title:
|
METHOD AND DEVICE OF MEMS PROCESS CONTROL MONITORING AND PACKAGED MEMS WITH DIFFERENT CAVITY PRESSURES
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|
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Patent #:
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|
Issue Dt:
|
04/24/2018
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Application #:
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14985388
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Filing Dt:
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12/30/2015
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Publication #:
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|
Pub Dt:
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06/23/2016
| | | | |
Title:
|
METHODS AND STRUCTURES OF INTEGRATED MEMS-CMOS DEVICES
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|
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Patent #:
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|
Issue Dt:
|
04/23/2019
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Application #:
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14987685
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Filing Dt:
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01/04/2016
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Title:
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METHOD TO TEST THE QUALITY FACTOR OF A MEMS GYROSCOPE AT CHIP PROBE
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|
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Patent #:
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|
Issue Dt:
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08/27/2019
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Application #:
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15365851
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Filing Dt:
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11/30/2016
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Publication #:
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Pub Dt:
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03/23/2017
| | | | |
Title:
|
INTEGRATED MEMS INERTIAL SENSING DEVICE
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|
|
Patent #:
|
|
Issue Dt:
|
10/23/2018
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Application #:
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15442488
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Filing Dt:
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02/24/2017
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Publication #:
|
|
Pub Dt:
|
06/15/2017
| | | | |
Title:
|
INTEGRATED INERTIAL SENSING DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/14/2018
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Application #:
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15479154
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Filing Dt:
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04/04/2017
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Publication #:
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|
Pub Dt:
|
10/05/2017
| | | | |
Title:
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APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
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|
|
Patent #:
|
|
Issue Dt:
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04/20/2021
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Application #:
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15917505
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Filing Dt:
|
03/09/2018
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Title:
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ULTRA-LOW POWER SENSOR SYSTEMS FOR VIBRATION & MOTION DETECTION
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|
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Patent #:
|
|
Issue Dt:
|
11/19/2019
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Application #:
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16102592
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Filing Dt:
|
08/13/2018
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Publication #:
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Pub Dt:
|
12/06/2018
| | | | |
Title:
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APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
|
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