Patent Assignment Details
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| Reel/Frame: | 027139/0472 | |
| Pages: | 5 |
| | Recorded: | 10/28/2011 | | |
| Attorney Dkt #: | 2010-088 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/08/2014
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Application #:
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13251819
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Filing Dt:
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10/03/2011
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Publication #:
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Pub Dt:
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04/04/2013
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Title:
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TRANSFORMER-COUPLED RF SOURCE FOR PLASMA PROCESSING TOOL
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Assignee
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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CHANGHOON CHOI, REG. NO. 56798
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
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35 DORY ROAD
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GLOUCESTER, MA 01930
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