Patent Assignment Details
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Reel/Frame: | 037292/0473 | |
| Pages: | 3 |
| | Recorded: | 12/15/2015 | | |
Attorney Dkt #: | 34249U |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/15/2019
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Application #:
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14968346
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Filing Dt:
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12/14/2015
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Publication #:
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Pub Dt:
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06/23/2016
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Title:
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PLASMA PROCESSING APPARATUS WITH SHOWER PLATE HAVING PROTRUSION FOR SUPPRESSING FILM FORMATION IN GAS HOLES OF SHOWER PLATE
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Assignee
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AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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NATH, GOLDBERG & MEYER
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112 S. WEST ST.
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34249U_JLM/ALS
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ALEXANDRIA, VA 22314
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