Patent Assignment Details
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Reel/Frame: | 021987/0482 | |
| Pages: | 3 |
| | Recorded: | 12/16/2008 | | |
Attorney Dkt #: | KLA-P1996/US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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12335736
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Filing Dt:
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12/16/2008
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Title:
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DYNAMIC TRACKING OF WAFER MOTION AND DISTORTION DURING LITHOGRAPHY
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Assignee
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160 RIO ROBLES |
SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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JOSHUA D. ISENBERG
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809 CORPORATE WAY
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FREMONT, CA 94539
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