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Patent #:
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Issue Dt:
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06/02/2009
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Application #:
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11464622
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Filing Dt:
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08/15/2006
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Publication #:
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Pub Dt:
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02/22/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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11/10/2009
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Application #:
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11464658
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Filing Dt:
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08/15/2006
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Publication #:
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Pub Dt:
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03/29/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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09/23/2008
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Application #:
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11467316
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Filing Dt:
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08/25/2006
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Publication #:
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Pub Dt:
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03/01/2007
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Title:
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RESIST REMOVING METHOD AND RESIST REMOVING APPARATUS
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Patent #:
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Issue Dt:
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04/17/2012
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Application #:
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11469700
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Filing Dt:
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09/01/2006
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Pub Dt:
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04/12/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
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Patent #:
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Issue Dt:
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12/08/2009
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Application #:
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11472612
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Filing Dt:
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06/22/2006
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Publication #:
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Pub Dt:
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10/26/2006
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Title:
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TREATING SOLUTION SUPPLY NOZZLE, A SUBSTRATE TREATING APPARATUS HAVING THIS NOZZLE, AND A METHOD OF MANUFACTURING A TREATING SOLUTION SUPPLY NOZZLE
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Patent #:
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Issue Dt:
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10/21/2008
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Application #:
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11479296
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Filing Dt:
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06/30/2006
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Publication #:
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Pub Dt:
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01/04/2007
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Title:
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REFLECTED LIGHT INTENSITY RATIO MEASURING DEVICE, DEVICE FOR MEASURING LIGHT ENERGY ABSORPTION RATIO AND HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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12/23/2008
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Application #:
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11489339
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Filing Dt:
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07/19/2006
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Publication #:
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Pub Dt:
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01/25/2007
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Title:
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SUBSTRATE HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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09/06/2011
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Application #:
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11531428
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Filing Dt:
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09/13/2006
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Publication #:
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Pub Dt:
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04/05/2007
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Title:
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APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOSURE PROCESS
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Patent #:
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Issue Dt:
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06/14/2011
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Application #:
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11548855
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Filing Dt:
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10/12/2006
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Publication #:
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Pub Dt:
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04/19/2007
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/15/2012
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Application #:
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11560121
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Filing Dt:
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11/15/2006
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Publication #:
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Pub Dt:
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05/24/2007
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Title:
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SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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12/17/2013
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Application #:
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11566442
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Filing Dt:
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12/04/2006
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Publication #:
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Pub Dt:
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06/07/2007
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Title:
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SUBSTRATE HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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08/23/2011
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Application #:
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11566489
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Filing Dt:
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12/04/2006
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Publication #:
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Pub Dt:
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06/07/2007
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Title:
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SUBSTRATE HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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05/18/2010
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Application #:
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11566507
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Filing Dt:
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12/04/2006
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Publication #:
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Pub Dt:
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06/07/2007
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Title:
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SUBSTRATE HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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01/11/2011
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Application #:
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11567452
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Filing Dt:
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12/06/2006
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Publication #:
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Pub Dt:
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06/14/2007
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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02/04/2014
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Application #:
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11572665
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Filing Dt:
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06/19/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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Carbon Nanotube Device and Process for Producing the Same
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Patent #:
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Issue Dt:
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10/27/2009
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Application #:
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11612948
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Filing Dt:
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12/19/2006
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Publication #:
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Pub Dt:
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06/21/2007
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/05/2010
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Application #:
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11627726
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Filing Dt:
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01/26/2007
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Publication #:
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Pub Dt:
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08/02/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/12/2011
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Application #:
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11671581
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Filing Dt:
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02/06/2007
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Publication #:
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Pub Dt:
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08/09/2007
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Title:
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DEVELOPING APPARATUS AND DEVELOPING METHOD
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Patent #:
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Issue Dt:
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05/10/2011
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Application #:
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11672284
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Filing Dt:
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02/07/2007
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Publication #:
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Pub Dt:
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10/18/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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02/26/2008
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Application #:
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11679537
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Filing Dt:
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02/27/2007
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Publication #:
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Pub Dt:
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09/06/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HANDLING METHOD
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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11688006
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Filing Dt:
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03/19/2007
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Publication #:
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Pub Dt:
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09/27/2007
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Title:
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SUBSTRATE SUPPORT STRUCTURE, HEAT TREATMENT APPARATUS USING SAME, FIRST SHEET-LIKE OBJECT FOR USE IN THE SUBSTRATE SUPPORT STRUCTURE, METHOD OF MANUFACTURING THE SUBSTRATE SUPPORT STRUCTURE, HEAT TREATMENT APPARATUS, AND SUBSTRATE SUCKING METHOD
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Patent #:
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Issue Dt:
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11/30/2010
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Application #:
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11689077
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Filing Dt:
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03/21/2007
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Publication #:
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Pub Dt:
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09/27/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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09/11/2012
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11689194
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03/21/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFERRING METHOD
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Patent #:
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Issue Dt:
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05/12/2009
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Application #:
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11692378
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Filing Dt:
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03/28/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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HEAT TREATMENT APPARATUS OF LIGHT EMISSION TYPE
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Patent #:
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Issue Dt:
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01/26/2010
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Application #:
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11693330
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Filing Dt:
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03/29/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/20/2011
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11693985
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Filing Dt:
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03/30/2007
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Publication #:
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Pub Dt:
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10/04/2007
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Title:
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SUBSTRATE TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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11/23/2010
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11758389
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06/05/2007
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Pub Dt:
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12/06/2007
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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08/31/2010
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11761121
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06/11/2007
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12/20/2007
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Title:
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SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
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03/24/2009
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11767379
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06/22/2007
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12/27/2007
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Title:
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SUBSTRATE TREATING APPARATUS
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04/19/2011
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11828514
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07/26/2007
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01/31/2008
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SUBSTRATE PROCESSING APPARATUS
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01/15/2013
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11832682
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08/02/2007
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02/14/2008
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SUSCEPTOR FOR HEAT TREATMENT AND HEAT TREATMENT APPARATUS
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10/04/2011
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11837575
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08/13/2007
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03/13/2008
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SUBSTRATE PROCESSING APPARATUS, LIQUID FILM FREEZING METHOD AND SUBSTRATE PROCESSING METHOD
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04/13/2010
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11839134
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08/15/2007
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12/20/2007
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MANAGING APPARATUS FOR SUBSTRATE PROCESSING SYSTEM
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02/07/2012
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11860173
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09/24/2007
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04/03/2008
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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06/14/2011
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11864081
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09/28/2007
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04/03/2008
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SUBSTRATE PROCESSING APPARATUS
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05/17/2011
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11866457
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10/03/2007
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05/29/2008
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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06/21/2011
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11871241
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10/12/2007
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05/01/2008
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Title:
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
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11/02/2010
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11928694
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10/30/2007
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05/29/2008
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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07/05/2011
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11938876
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11/13/2007
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05/22/2008
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HEAT TREATMENT APPARATUS WHICH EMITS FLASH OF LIGHT
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06/23/2009
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11948198
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11/30/2007
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04/24/2008
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SUBSTRATE TREATING APPARATUS
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02/21/2012
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11957741
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12/17/2007
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06/19/2008
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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02/01/2011
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11958996
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12/18/2007
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07/03/2008
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SUBSTRATE PROCESSING APPARATUS
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09/20/2011
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11964421
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12/26/2007
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10/16/2008
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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05/08/2012
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11970002
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01/07/2008
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08/14/2008
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HEAT TREATMENT APPARATUS EMITTING FLASH OF LIGHT
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06/24/2014
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12029735
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02/12/2008
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08/21/2008
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SUBSTRATE PROCESSING APPARATUS
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06/26/2012
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02/13/2008
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10/02/2008
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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10/11/2011
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03/06/2008
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09/11/2008
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SUBSTRATE TREATMENT APPARATUS
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10/30/2012
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03/11/2008
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10/02/2008
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12/08/2009
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03/12/2008
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10/02/2008
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SUBSTRATE PROCESSING APPARATUS FOR PROCESSING PLURALITY OF SUBSTRATES IN SUCCESSION
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11/08/2011
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12109059
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04/24/2008
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10/30/2008
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Title:
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SUBSTRATE TREATMENT APPARATUS
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10/18/2011
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12115801
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05/06/2008
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11/27/2008
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IMAGE DATA GENERATING METHOD, PRINTING METHOD, IMAGE DATA GENERATING APPARATUS, AND PRINTER
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10/02/2012
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12115879
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05/06/2008
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11/27/2008
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Title:
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THRESHOLD MATRIX GENERATING METHOD, IMAGE DATA GENERATING METHOD, IMAGE DATA GENERATING APPARATUS, IMAGE RECORDING APPARATUS AND RECORDING MEDIUM
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10/02/2012
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12161263
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07/17/2008
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09/23/2010
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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09/21/2010
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12170042
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07/09/2008
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01/15/2009
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Title:
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SCHEDULING METHOD AND PROGRAM FOR A SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
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03/06/2012
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Application #:
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12176601
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Filing Dt:
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07/21/2008
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Publication #:
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Pub Dt:
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01/29/2009
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Title:
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SUBTRATE TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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06/21/2011
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Application #:
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12179154
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Filing Dt:
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07/24/2008
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Publication #:
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Pub Dt:
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02/05/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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11/01/2011
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Application #:
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12183159
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Filing Dt:
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07/31/2008
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Publication #:
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Pub Dt:
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03/12/2009
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Title:
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HEAT TREATMENT APPARATUS HEATING SUBSTRATE BY IRRADIATION WITH LIGHT
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Patent #:
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Issue Dt:
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06/10/2014
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Application #:
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12191603
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Filing Dt:
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08/14/2008
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Publication #:
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Pub Dt:
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02/19/2009
| | | | |
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Title:
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SUBSTRATE TREATING SYSTEM
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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12192238
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Filing Dt:
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08/15/2008
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Publication #:
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Pub Dt:
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11/27/2008
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Title:
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RESIST REMOVING METHOD AND RESIST REMOVING APPARATUS
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Patent #:
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Issue Dt:
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04/10/2012
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Application #:
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12194218
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Filing Dt:
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08/19/2008
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Publication #:
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Pub Dt:
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12/18/2008
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Title:
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SUBSTRATE TREATING METHOD
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Patent #:
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Issue Dt:
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06/14/2011
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Application #:
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12195521
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Filing Dt:
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08/21/2008
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Publication #:
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Pub Dt:
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02/26/2009
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Title:
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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
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Patent #:
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Issue Dt:
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07/03/2012
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Application #:
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12203394
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Filing Dt:
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09/03/2008
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Publication #:
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Pub Dt:
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03/26/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR PERFORMING ETCHING PROCESS WITH PHOSPHORIC ACID SOLUTION
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Patent #:
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Issue Dt:
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10/25/2011
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Application #:
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12207633
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Filing Dt:
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09/10/2008
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Publication #:
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Pub Dt:
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03/26/2009
| | | | |
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Title:
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APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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07/24/2012
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Application #:
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12209244
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Filing Dt:
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09/12/2008
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Publication #:
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Pub Dt:
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04/23/2009
| | | | |
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Title:
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HEAT TREATMENT APPARATUS AND METHOD FOR HEATING SUBSTRATE BY IRRADIATION THEREOF WITH LIGHT
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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12259567
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Filing Dt:
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10/28/2008
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Publication #:
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Pub Dt:
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04/30/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND A SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12334622
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Filing Dt:
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12/15/2008
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Publication #:
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Pub Dt:
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07/16/2009
| | | | |
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Title:
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HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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09/07/2010
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Application #:
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12336724
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Filing Dt:
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12/17/2008
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Publication #:
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Pub Dt:
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04/09/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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07/10/2012
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Application #:
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12339980
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Filing Dt:
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12/19/2008
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Publication #:
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Pub Dt:
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06/25/2009
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Title:
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SUBSTRATE TREATING APPARATUS, AND A SUBSTRATE TRANSPORTING METHOD THEREFOR
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Patent #:
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Issue Dt:
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02/04/2014
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Application #:
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12340235
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Filing Dt:
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12/19/2008
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Publication #:
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Pub Dt:
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06/25/2009
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Title:
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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Patent #:
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Issue Dt:
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11/27/2012
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Application #:
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12359756
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01/26/2009
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Publication #:
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Pub Dt:
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08/27/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/01/2012
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Application #:
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12372913
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Filing Dt:
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02/18/2009
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Publication #:
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Pub Dt:
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09/17/2009
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Title:
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THRESHOLD MATRIX GENERATION METHOD, HALFTONE IMAGE GENERATION METHOD, AND HALFTONE IMAGE GENERATING APPARATUS
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12395940
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Filing Dt:
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03/02/2009
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Publication #:
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Pub Dt:
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10/01/2009
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Title:
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LIGHT-EMITTING HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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10/13/2009
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Application #:
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12397632
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Filing Dt:
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03/04/2009
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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02/07/2012
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Application #:
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12398490
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Filing Dt:
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03/05/2009
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Publication #:
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Pub Dt:
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10/22/2009
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Title:
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HALFTONE IMAGE GENERATION METHOD, THRESHOLD MATRIX GENERATION METHOD, THRESHOLD MATRIX, PRINTING PLATE MANUFACTURING METHOD, AND PRINTING PLATE
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02/08/2011
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12401697
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03/11/2009
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Pub Dt:
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07/16/2009
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Title:
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SUBSTRATE TREATING APPARATUS AND METHOD
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Patent #:
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07/19/2011
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12404434
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03/16/2009
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Pub Dt:
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11/05/2009
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Title:
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METHOD AND APPARATUS FOR PROCESSING SEMICONDUCTOR WAFER AFTER IMPURITY IMPLANTATION
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07/10/2012
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12410049
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03/24/2009
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10/01/2009
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Title:
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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02/12/2013
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12411266
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03/25/2009
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10/01/2009
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Title:
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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03/27/2012
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12421896
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04/10/2009
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Pub Dt:
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10/22/2009
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Title:
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HEAT TREATMENT APPARATUS AND METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
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10/18/2011
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12424192
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04/15/2009
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11/19/2009
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Title:
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HEAT TREATMENT APPARATUS AND METHOD FOR HEATING SUBSTRATE BY PHOTO-IRRADIATION
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10/15/2013
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12563409
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09/21/2009
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05/06/2010
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Title:
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HEAT TREATMENT APPARATUS AND METHOD FOR HEATING SUBSTRATE BY PHOTO-IRRADIATION
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03/26/2013
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12596071
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10/15/2009
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04/01/2010
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IMAGE RECORDING APPARATUS
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01/29/2013
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12608662
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10/29/2009
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04/29/2010
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SUBSTRATE TREATMENT APPARATUS
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01/29/2013
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12636358
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12/11/2009
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07/01/2010
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05/08/2012
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12638342
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12/15/2009
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07/01/2010
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06/11/2013
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12648737
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12/29/2009
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07/15/2010
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HEAT TREATMENT APPARATUS AND METHOD FOR HEATING SUBSTRATE BY LIGHT-IRRADIATION
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08/06/2013
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12722063
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03/11/2010
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09/30/2010
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03/06/2012
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03/26/2010
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10/28/2010
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HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
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02/19/2013
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06/01/2010
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12/30/2010
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IMAGE RECORDING DEVICE
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04/12/2011
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05/18/2010
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09/09/2010
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SUBSTRATE TREATING APPARATUS AND METHOD
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01/22/2013
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12842485
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07/23/2010
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11/11/2010
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06/11/2013
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08/20/2010
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03/31/2011
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08/06/2013
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12886063
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09/20/2010
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01/13/2011
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SUBSTRATE TRANSPORTING APPARATUS, SUBSTRATE PLATFORM SHELF AND SUBSTRATE PROCESSING APPARATUS
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05/07/2013
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09/23/2010
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03/24/2011
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11/12/2013
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10/01/2010
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05/17/2012
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IMAGE RECORDING DEVICE
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02/18/2014
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01/28/2011
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06/02/2011
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SUBSTRATE TREATING METHOD FOR TREATING SUBSTRATES WITH TREATING LIQUIDS
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05/27/2014
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03/10/2011
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10/06/2011
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SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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08/06/2013
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03/10/2011
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10/06/2011
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SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
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07/08/2014
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13155020
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06/07/2011
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01/05/2012
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12/17/2013
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07/07/2011
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12/15/2011
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SUBSTRATE TREATING METHOD
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