Patent Assignment Details
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Reel/Frame: | 006451/0484 | |
| Pages: | 2 |
| | Recorded: | 02/02/1993 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/28/1993
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Application #:
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07864185
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Filing Dt:
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04/03/1992
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Title:
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INDIRECT TEMPERATURE MEASUREMENT OF FILMS FORMED ON SEMICONDUCTOR WAFERS
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Assignees
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2655 TSUKURE, KIKUYO-MACHI, KIKUCHI-GUN |
KUMAMOTO 869-11, JAPAN |
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2-3-9, AMANUMA, SUGINAMI-KU |
TOKYO 167, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER &
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NEUSTADT, P.C.
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STUART D. DWORK
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1755 JEFFERSON DAVIS HWY., 4TH FLOOR
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ARLINGTON, VA 22202
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