Patent Assignment Details
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| Reel/Frame: | 013802/0486 | |
| Pages: | 5 |
| | Recorded: | 03/04/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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10324603
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Filing Dt:
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12/20/2002
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Title:
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METHOD FOR ETCHING A TAPERED BORE IN A SILICON SUBSTRATE, AND A SEMICONDUCTOR WAFER COMPRISING THE SUBSTRATE
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Assignee
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| ONE TECHNOLOGY WAY |
| P.O. BOX 9106 |
| NORWOOD, MASSACHUSETTS 02062-9106 |
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Correspondence name and address
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SAMUELS, GAUTHIER & STEVENS LLP
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MATTHEW E. CONNORS
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225 FRANKLIN STREET
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STE. 3300
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BOSTON, MA 02110
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