Total properties:
241
Page
2
of
3
Pages:
1 2 3
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2017
|
Application #:
|
14490239
|
Filing Dt:
|
09/18/2014
|
Publication #:
|
|
Pub Dt:
|
04/02/2015
| | | | |
Title:
|
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2015
|
Application #:
|
14493828
|
Filing Dt:
|
09/23/2014
|
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/2016
|
Application #:
|
14494085
|
Filing Dt:
|
09/23/2014
|
Publication #:
|
|
Pub Dt:
|
10/15/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM THEREOF AND SEMICONDUCTOR MANUFACTURING METHOD BY EMPLOYING THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
11/29/2016
|
Application #:
|
14495226
|
Filing Dt:
|
09/24/2014
|
Publication #:
|
|
Pub Dt:
|
03/26/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY ALTERNATIVELY INCREASING AND DECREASING PRESSURE OF PROCESS CHAMBER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/30/2015
|
Application #:
|
14495388
|
Filing Dt:
|
09/24/2014
|
Publication #:
|
|
Pub Dt:
|
04/02/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/28/2017
|
Application #:
|
14496660
|
Filing Dt:
|
09/25/2014
|
Publication #:
|
|
Pub Dt:
|
04/23/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/2015
|
Application #:
|
14499952
|
Filing Dt:
|
09/29/2014
|
Publication #:
|
|
Pub Dt:
|
04/02/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/23/2017
|
Application #:
|
14500338
|
Filing Dt:
|
09/29/2014
|
Publication #:
|
|
Pub Dt:
|
07/30/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2018
|
Application #:
|
14501606
|
Filing Dt:
|
09/30/2014
|
Publication #:
|
|
Pub Dt:
|
04/23/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/23/2015
|
Application #:
|
14502044
|
Filing Dt:
|
09/30/2014
|
Publication #:
|
|
Pub Dt:
|
06/04/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2017
|
Application #:
|
14551900
|
Filing Dt:
|
11/24/2014
|
Publication #:
|
|
Pub Dt:
|
06/04/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/29/2016
|
Application #:
|
14566989
|
Filing Dt:
|
12/11/2014
|
Publication #:
|
|
Pub Dt:
|
08/06/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/2016
|
Application #:
|
14582646
|
Filing Dt:
|
12/24/2014
|
Publication #:
|
|
Pub Dt:
|
07/02/2015
| | | | |
Title:
|
FILM FORMING METHOD AND RECORDING MEDIUM FOR PERFORMING THE METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2017
|
Application #:
|
14591544
|
Filing Dt:
|
01/07/2015
|
Publication #:
|
|
Pub Dt:
|
07/16/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/2016
|
Application #:
|
14595046
|
Filing Dt:
|
01/12/2015
|
Publication #:
|
|
Pub Dt:
|
05/07/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2017
|
Application #:
|
14601634
|
Filing Dt:
|
01/21/2015
|
Publication #:
|
|
Pub Dt:
|
07/23/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, INCLUDING FILM HAVING UNIFORM THICKNESS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2017
|
Application #:
|
14605157
|
Filing Dt:
|
01/26/2015
|
Publication #:
|
|
Pub Dt:
|
05/14/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2017
|
Application #:
|
14608937
|
Filing Dt:
|
01/29/2015
|
Publication #:
|
|
Pub Dt:
|
05/21/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/20/2018
|
Application #:
|
14613926
|
Filing Dt:
|
02/04/2015
|
Publication #:
|
|
Pub Dt:
|
07/30/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/2017
|
Application #:
|
14619318
|
Filing Dt:
|
02/11/2015
|
Publication #:
|
|
Pub Dt:
|
08/13/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2017
|
Application #:
|
14622115
|
Filing Dt:
|
02/13/2015
|
Publication #:
|
|
Pub Dt:
|
08/20/2015
| | | | |
Title:
|
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/2018
|
Application #:
|
14628963
|
Filing Dt:
|
02/23/2015
|
Publication #:
|
|
Pub Dt:
|
08/27/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2016
|
Application #:
|
14629338
|
Filing Dt:
|
02/23/2015
|
Publication #:
|
|
Pub Dt:
|
06/18/2015
| | | | |
Title:
|
SEMICONDUCTOR DEVICE HAVING ELECTRODE MADE OF HIGH WORK FUNCTION MATERIAL AND METHOD OF MANUFACTURING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/2016
|
Application #:
|
14629345
|
Filing Dt:
|
02/23/2015
|
Publication #:
|
|
Pub Dt:
|
06/18/2015
| | | | |
Title:
|
SEMICONDUCTOR DEVICE HAVING ELECTRODE MADE OF HIGH WORK FUNCTION MATERIAL, METHOD AND APPARATUS FOR MANUFACTURING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
04/04/2017
|
Application #:
|
14634280
|
Filing Dt:
|
02/27/2015
|
Publication #:
|
|
Pub Dt:
|
09/10/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/2017
|
Application #:
|
14638396
|
Filing Dt:
|
03/04/2015
|
Publication #:
|
|
Pub Dt:
|
06/25/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/23/2016
|
Application #:
|
14661970
|
Filing Dt:
|
03/18/2015
|
Publication #:
|
|
Pub Dt:
|
07/09/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2016
|
Application #:
|
14665781
|
Filing Dt:
|
03/23/2015
|
Publication #:
|
|
Pub Dt:
|
09/24/2015
| | | | |
Title:
|
REACTION TUBE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2016
|
Application #:
|
14666969
|
Filing Dt:
|
03/24/2015
|
Publication #:
|
|
Pub Dt:
|
10/01/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2016
|
Application #:
|
14667063
|
Filing Dt:
|
03/24/2015
|
Publication #:
|
|
Pub Dt:
|
10/01/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/19/2016
|
Application #:
|
14667323
|
Filing Dt:
|
03/24/2015
|
Publication #:
|
|
Pub Dt:
|
09/24/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/2016
|
Application #:
|
14668714
|
Filing Dt:
|
03/25/2015
|
Publication #:
|
|
Pub Dt:
|
07/16/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/2016
|
Application #:
|
14668721
|
Filing Dt:
|
03/25/2015
|
Publication #:
|
|
Pub Dt:
|
07/16/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2016
|
Application #:
|
14668725
|
Filing Dt:
|
03/25/2015
|
Publication #:
|
|
Pub Dt:
|
07/16/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2018
|
Application #:
|
14669462
|
Filing Dt:
|
03/26/2015
|
Publication #:
|
|
Pub Dt:
|
07/16/2015
| | | | |
Title:
|
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
14671211
|
Filing Dt:
|
03/27/2015
|
Publication #:
|
|
Pub Dt:
|
03/03/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/20/2018
|
Application #:
|
14671504
|
Filing Dt:
|
03/27/2015
|
Publication #:
|
|
Pub Dt:
|
10/22/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, USING HYDROCARBON AND HALOGEN-BASED PRECURSORS, SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SAME, AND RECORDING MEDIUM COMPRISING HYDROCARBON AND HALOGEN-BASED PRECURSORS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/16/2018
|
Application #:
|
14672795
|
Filing Dt:
|
03/30/2015
|
Publication #:
|
|
Pub Dt:
|
01/07/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2016
|
Application #:
|
14677199
|
Filing Dt:
|
04/02/2015
|
Publication #:
|
|
Pub Dt:
|
10/08/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/2016
|
Application #:
|
14681055
|
Filing Dt:
|
04/07/2015
|
Publication #:
|
|
Pub Dt:
|
07/30/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2018
|
Application #:
|
14681065
|
Filing Dt:
|
04/07/2015
|
Publication #:
|
|
Pub Dt:
|
07/30/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2018
|
Application #:
|
14681067
|
Filing Dt:
|
04/07/2015
|
Publication #:
|
|
Pub Dt:
|
07/30/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/16/2017
|
Application #:
|
14697274
|
Filing Dt:
|
04/27/2015
|
Publication #:
|
|
Pub Dt:
|
08/13/2015
| | | | |
Title:
|
METHOD OF FORMING METAL-CONTAINING FILM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/2015
|
Application #:
|
14708004
|
Filing Dt:
|
05/08/2015
|
Publication #:
|
|
Pub Dt:
|
08/27/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/2016
|
Application #:
|
14719097
|
Filing Dt:
|
05/21/2015
|
Publication #:
|
|
Pub Dt:
|
09/10/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2016
|
Application #:
|
14725865
|
Filing Dt:
|
05/29/2015
|
Publication #:
|
|
Pub Dt:
|
09/17/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING A SIOCN FILM, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2017
|
Application #:
|
14728728
|
Filing Dt:
|
06/02/2015
|
Publication #:
|
|
Pub Dt:
|
12/10/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/12/2016
|
Application #:
|
14747674
|
Filing Dt:
|
06/23/2015
|
Publication #:
|
|
Pub Dt:
|
10/08/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2016
|
Application #:
|
14752131
|
Filing Dt:
|
06/26/2015
|
Publication #:
|
|
Pub Dt:
|
12/31/2015
| | | | |
Title:
|
CLEANING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/10/2017
|
Application #:
|
14778170
|
Filing Dt:
|
09/18/2015
|
Publication #:
|
|
Pub Dt:
|
09/29/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/14/2017
|
Application #:
|
14781074
|
Filing Dt:
|
09/29/2015
|
Publication #:
|
|
Pub Dt:
|
10/20/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
14791990
|
Filing Dt:
|
07/06/2015
|
Publication #:
|
|
Pub Dt:
|
10/29/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/2017
|
Application #:
|
14794519
|
Filing Dt:
|
07/08/2015
|
Publication #:
|
|
Pub Dt:
|
01/14/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/22/2018
|
Application #:
|
14804604
|
Filing Dt:
|
07/21/2015
|
Publication #:
|
|
Pub Dt:
|
01/28/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING FORMING A FILM CONTAINING A FIRST ELEMENT, A SECOND ELEMENT AND CARBON, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/21/2017
|
Application #:
|
14805104
|
Filing Dt:
|
07/21/2015
|
Publication #:
|
|
Pub Dt:
|
11/26/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2018
|
Application #:
|
14805506
|
Filing Dt:
|
07/22/2015
|
Publication #:
|
|
Pub Dt:
|
11/19/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2017
|
Application #:
|
14807670
|
Filing Dt:
|
07/23/2015
|
Publication #:
|
|
Pub Dt:
|
11/19/2015
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/08/2016
|
Application #:
|
14810996
|
Filing Dt:
|
07/28/2015
|
Publication #:
|
|
Pub Dt:
|
08/11/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2016
|
Application #:
|
14832496
|
Filing Dt:
|
08/21/2015
|
Publication #:
|
|
Pub Dt:
|
02/25/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/02/2017
|
Application #:
|
14838793
|
Filing Dt:
|
08/28/2015
|
Publication #:
|
|
Pub Dt:
|
03/03/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2017
|
Application #:
|
14839179
|
Filing Dt:
|
08/28/2015
|
Publication #:
|
|
Pub Dt:
|
12/24/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2016
|
Application #:
|
14856244
|
Filing Dt:
|
09/16/2015
|
Publication #:
|
|
Pub Dt:
|
03/17/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
14856881
|
Filing Dt:
|
09/17/2015
|
Publication #:
|
|
Pub Dt:
|
03/24/2016
| | | | |
Title:
|
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/31/2018
|
Application #:
|
14859855
|
Filing Dt:
|
09/21/2015
|
Publication #:
|
|
Pub Dt:
|
04/07/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/2017
|
Application #:
|
14859924
|
Filing Dt:
|
09/21/2015
|
Publication #:
|
|
Pub Dt:
|
03/24/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/30/2016
|
Application #:
|
14861051
|
Filing Dt:
|
09/22/2015
|
Title:
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/27/2016
|
Application #:
|
14864167
|
Filing Dt:
|
09/24/2015
|
Publication #:
|
|
Pub Dt:
|
01/14/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2017
|
Application #:
|
14886768
|
Filing Dt:
|
10/19/2015
|
Publication #:
|
|
Pub Dt:
|
02/11/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/09/2018
|
Application #:
|
14914142
|
Filing Dt:
|
02/24/2016
|
Publication #:
|
|
Pub Dt:
|
07/21/2016
| | | | |
Title:
|
MAINTENANCE METHOD OF SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM CAPABLE OF READING MAINTENANCE PROGRAM OF SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2016
|
Application #:
|
14929973
|
Filing Dt:
|
11/02/2015
|
Publication #:
|
|
Pub Dt:
|
05/19/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, GAS SUPPLY SYSTEM, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2016
|
Application #:
|
14939901
|
Filing Dt:
|
11/12/2015
|
Publication #:
|
|
Pub Dt:
|
03/10/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2016
|
Application #:
|
14958517
|
Filing Dt:
|
12/03/2015
|
Publication #:
|
|
Pub Dt:
|
03/24/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2017
|
Application #:
|
14975987
|
Filing Dt:
|
12/21/2015
|
Publication #:
|
|
Pub Dt:
|
10/06/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
14979898
|
Filing Dt:
|
12/28/2015
|
Publication #:
|
|
Pub Dt:
|
03/30/2017
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2017
|
Application #:
|
14994334
|
Filing Dt:
|
01/13/2016
|
Publication #:
|
|
Pub Dt:
|
07/14/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/28/2018
|
Application #:
|
15010333
|
Filing Dt:
|
01/29/2016
|
Publication #:
|
|
Pub Dt:
|
08/04/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/2016
|
Application #:
|
15010682
|
Filing Dt:
|
01/29/2016
|
Publication #:
|
|
Pub Dt:
|
08/04/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2018
|
Application #:
|
15011033
|
Filing Dt:
|
01/29/2016
|
Publication #:
|
|
Pub Dt:
|
06/02/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
15011117
|
Filing Dt:
|
01/29/2016
|
Publication #:
|
|
Pub Dt:
|
06/02/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
15015461
|
Filing Dt:
|
02/04/2016
|
Publication #:
|
|
Pub Dt:
|
10/06/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2018
|
Application #:
|
15024539
|
Filing Dt:
|
03/24/2016
|
Publication #:
|
|
Pub Dt:
|
08/25/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2018
|
Application #:
|
15051740
|
Filing Dt:
|
02/24/2016
|
Publication #:
|
|
Pub Dt:
|
08/25/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2018
|
Application #:
|
15053489
|
Filing Dt:
|
02/25/2016
|
Publication #:
|
|
Pub Dt:
|
08/25/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2017
|
Application #:
|
15066081
|
Filing Dt:
|
03/10/2016
|
Publication #:
|
|
Pub Dt:
|
03/30/2017
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2017
|
Application #:
|
15067790
|
Filing Dt:
|
03/11/2016
|
Publication #:
|
|
Pub Dt:
|
10/06/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2017
|
Application #:
|
15070387
|
Filing Dt:
|
03/15/2016
|
Publication #:
|
|
Pub Dt:
|
09/29/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2017
|
Application #:
|
15070640
|
Filing Dt:
|
03/15/2016
|
Publication #:
|
|
Pub Dt:
|
08/03/2017
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/2017
|
Application #:
|
15078253
|
Filing Dt:
|
03/23/2016
|
Publication #:
|
|
Pub Dt:
|
07/14/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/2017
|
Application #:
|
15084847
|
Filing Dt:
|
03/30/2016
|
Publication #:
|
|
Pub Dt:
|
07/21/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2018
|
Application #:
|
15124915
|
Filing Dt:
|
09/09/2016
|
Publication #:
|
|
Pub Dt:
|
01/19/2017
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2018
|
Application #:
|
15141580
|
Filing Dt:
|
04/28/2016
|
Publication #:
|
|
Pub Dt:
|
08/18/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM THEREOF AND SEMICONDUCTOR MANUFACTURING METHOD BY EMPLOYING THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
09/26/2017
|
Application #:
|
15170352
|
Filing Dt:
|
06/01/2016
|
Publication #:
|
|
Pub Dt:
|
12/08/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2017
|
Application #:
|
15190578
|
Filing Dt:
|
06/23/2016
|
Publication #:
|
|
Pub Dt:
|
10/20/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS, APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND GAS SUPPLY SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/29/2017
|
Application #:
|
15191055
|
Filing Dt:
|
06/23/2016
|
Publication #:
|
|
Pub Dt:
|
10/20/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2017
|
Application #:
|
15195086
|
Filing Dt:
|
06/28/2016
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/05/2017
|
Application #:
|
15202168
|
Filing Dt:
|
07/05/2016
|
Publication #:
|
|
Pub Dt:
|
10/27/2016
| | | | |
Title:
|
METHOD OF MANUFACTURING A SIOCN FILM, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2018
|
Application #:
|
15204781
|
Filing Dt:
|
07/07/2016
|
Publication #:
|
|
Pub Dt:
|
01/12/2017
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/25/2018
|
Application #:
|
15211583
|
Filing Dt:
|
07/15/2016
|
Publication #:
|
|
Pub Dt:
|
02/23/2017
| | | | |
Title:
|
GAS SUPPLY NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/11/2017
|
Application #:
|
15216956
|
Filing Dt:
|
07/22/2016
|
Publication #:
|
|
Pub Dt:
|
01/26/2017
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2017
|
Application #:
|
15223020
|
Filing Dt:
|
07/29/2016
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
|
|