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Reel/Frame:047995/0490   Pages: 18
Recorded: 12/31/2018
Attorney Dkt #:HKEI TO KEC -SCHEDULE C
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 241
Page 3 of 3
Pages: 1 2 3
1
Patent #:
9934962
Issue Dt:
04/03/2018
Application #:
15223288
Filing Dt:
07/29/2016
Publication #:
US20170040157
Pub Dt:
02/09/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
2
Patent #:
9653301
Issue Dt:
05/16/2017
Application #:
15228840
Filing Dt:
08/04/2016
Publication #:
US20160343573
Pub Dt:
11/24/2016
Title:
SEMICONDUCTOR DEVICE HAVING ELECTRODE MADE OF HIGH WORK FUNCTION MATERIAL, METHOD AND APPARATUS FOR MANUFACTURING THE SAME
3
Patent #:
9816183
Issue Dt:
11/14/2017
Application #:
15259944
Filing Dt:
09/08/2016
Publication #:
US20170067157
Pub Dt:
03/09/2017
Title:
SUBSTRATE PROCESSING APPARATUS
4
Patent #:
9966286
Issue Dt:
05/08/2018
Application #:
15263478
Filing Dt:
09/13/2016
Publication #:
US20160379858
Pub Dt:
12/29/2016
Title:
SUBSTRATE PROCESSING APPARATUS
5
Patent #:
9991179
Issue Dt:
06/05/2018
Application #:
15265371
Filing Dt:
09/14/2016
Publication #:
US20170358506
Pub Dt:
12/14/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
6
Patent #:
9916976
Issue Dt:
03/13/2018
Application #:
15267390
Filing Dt:
09/16/2016
Publication #:
US20170004961
Pub Dt:
01/05/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
7
Patent #:
9875920
Issue Dt:
01/23/2018
Application #:
15270419
Filing Dt:
09/20/2016
Publication #:
US20180025920
Pub Dt:
01/25/2018
Title:
SUBSTRATE PROCESSING APPARATUS
8
Patent #:
9831249
Issue Dt:
11/28/2017
Application #:
15271962
Filing Dt:
09/21/2016
Publication #:
US20170092647
Pub Dt:
03/30/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
9
Patent #:
9895727
Issue Dt:
02/20/2018
Application #:
15272844
Filing Dt:
09/22/2016
Publication #:
US20170087606
Pub Dt:
03/30/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CLEANING INTERIOR OF PROCESS CHAMBER, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
10
Patent #:
9653351
Issue Dt:
05/16/2017
Application #:
15273067
Filing Dt:
09/22/2016
Publication #:
US20170011958
Pub Dt:
01/12/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
11
Patent #:
9984887
Issue Dt:
05/29/2018
Application #:
15273780
Filing Dt:
09/23/2016
Publication #:
US20170092503
Pub Dt:
03/30/2017
Title:
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
12
Patent #:
10032629
Issue Dt:
07/24/2018
Application #:
15274140
Filing Dt:
09/23/2016
Publication #:
US20170092486
Pub Dt:
03/30/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
13
Patent #:
9728409
Issue Dt:
08/08/2017
Application #:
15275576
Filing Dt:
09/26/2016
Publication #:
US20170011926
Pub Dt:
01/12/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
14
Patent #:
9812355
Issue Dt:
11/07/2017
Application #:
15280239
Filing Dt:
09/29/2016
Publication #:
US20170092535
Pub Dt:
03/30/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
15
Patent #:
9865458
Issue Dt:
01/09/2018
Application #:
15347347
Filing Dt:
11/09/2016
Publication #:
US20170117133
Pub Dt:
04/27/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
16
Patent #:
9691609
Issue Dt:
06/27/2017
Application #:
15368337
Filing Dt:
12/02/2016
Publication #:
US20170084455
Pub Dt:
03/23/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
17
Patent #:
9978653
Issue Dt:
05/22/2018
Application #:
15389766
Filing Dt:
12/23/2016
Publication #:
US20180090397
Pub Dt:
03/29/2018
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
18
Patent #:
10090152
Issue Dt:
10/02/2018
Application #:
15415032
Filing Dt:
01/25/2017
Publication #:
US20170221699
Pub Dt:
08/03/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
19
Patent #:
10062592
Issue Dt:
08/28/2018
Application #:
15418796
Filing Dt:
01/30/2017
Publication #:
US20170140963
Pub Dt:
05/18/2017
Title:
SUBSTRATE PROCESSING APPARATUS
20
Patent #:
9976214
Issue Dt:
05/22/2018
Application #:
15434796
Filing Dt:
02/16/2017
Publication #:
US20170260626
Pub Dt:
09/14/2017
Title:
CLEANING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
21
Patent #:
10090149
Issue Dt:
10/02/2018
Application #:
15436192
Filing Dt:
02/17/2017
Publication #:
US20170162386
Pub Dt:
06/08/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY FORMING AND MODIFYING FILM ON SUBSTRATE
22
Patent #:
9997354
Issue Dt:
06/12/2018
Application #:
15448519
Filing Dt:
03/02/2017
Publication #:
US20170263441
Pub Dt:
09/14/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
23
Patent #:
9905413
Issue Dt:
02/27/2018
Application #:
15453163
Filing Dt:
03/08/2017
Publication #:
US20170178889
Pub Dt:
06/22/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
24
Patent #:
9881789
Issue Dt:
01/30/2018
Application #:
15453731
Filing Dt:
03/08/2017
Publication #:
US20170178902
Pub Dt:
06/22/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
25
Patent #:
10128128
Issue Dt:
11/13/2018
Application #:
15460557
Filing Dt:
03/16/2017
Publication #:
US20170287731
Pub Dt:
10/05/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING AIR GAP BETWEEN WIRINGS FOR LOW DIELECTRIC CONSTANT
26
Patent #:
9870964
Issue Dt:
01/16/2018
Application #:
15460752
Filing Dt:
03/16/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY DETERMINING AND SELECTING COOLING RECIPE BASED ON TEMPERATURE
27
Patent #:
10090322
Issue Dt:
10/02/2018
Application #:
15462066
Filing Dt:
03/17/2017
Publication #:
US20180197877
Pub Dt:
07/12/2018
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
28
Patent #:
10014226
Issue Dt:
07/03/2018
Application #:
15465891
Filing Dt:
03/22/2017
Publication #:
US20170287786
Pub Dt:
10/05/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
29
Patent #:
9941119
Issue Dt:
04/10/2018
Application #:
15468966
Filing Dt:
03/24/2017
Publication #:
US20170213727
Pub Dt:
07/27/2017
Title:
METHOD OF FORMING SILICON LAYER IN MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
30
Patent #:
10128104
Issue Dt:
11/13/2018
Application #:
15474138
Filing Dt:
03/30/2017
Publication #:
US20170301539
Pub Dt:
10/19/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
31
Patent #:
10032626
Issue Dt:
07/24/2018
Application #:
15511831
Filing Dt:
03/16/2017
Publication #:
US20170287696
Pub Dt:
10/05/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY FORMING A FILM ON A SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
32
Patent #:
9966261
Issue Dt:
05/08/2018
Application #:
15632806
Filing Dt:
06/26/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
33
Patent #:
9982347
Issue Dt:
05/29/2018
Application #:
15672901
Filing Dt:
08/09/2017
Publication #:
US20180044794
Pub Dt:
02/15/2018
Title:
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
34
Patent #:
10115583
Issue Dt:
10/30/2018
Application #:
15687717
Filing Dt:
08/28/2017
Publication #:
US20180233348
Pub Dt:
08/16/2018
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
35
Patent #:
10096463
Issue Dt:
10/09/2018
Application #:
15700947
Filing Dt:
09/11/2017
Publication #:
US20180076017
Pub Dt:
03/15/2018
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS COMPRISING EXHAUST PORT AND MULTIPLE NOZZLES, AND RECORDING MEDIUM
36
Patent #:
10134587
Issue Dt:
11/20/2018
Application #:
15703631
Filing Dt:
09/13/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
37
Patent #:
10121651
Issue Dt:
11/06/2018
Application #:
15704603
Filing Dt:
09/14/2017
Publication #:
US20180182619
Pub Dt:
06/28/2018
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
38
Patent #:
10032630
Issue Dt:
07/24/2018
Application #:
15710414
Filing Dt:
09/20/2017
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
39
Patent #:
10121650
Issue Dt:
11/06/2018
Application #:
15940618
Filing Dt:
03/29/2018
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
40
Patent #:
D655682
Issue Dt:
03/13/2012
Application #:
29378011
Filing Dt:
10/28/2010
Title:
BOAT OF WAFER PROCESSING APPARATUS
41
Patent #:
D655255
Issue Dt:
03/06/2012
Application #:
29378016
Filing Dt:
10/28/2010
Title:
BOAT OF WAFER PROCESSING APPARATUS
Assignor
1
HITACHI KOKUSAI ELECTRIC INC.
Exec Dt:
12/05/2018
Assignee
1
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondence name and address
VOLPE & KOENIG, P.C.
30 SOUTH 17TH STREET
SUITE 1800
PHILADELPHIA, PA 19103

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