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Reel/Frame:	024202/0494			Pages:	14
		Recorded:	04/08/2010
Attorney Dkt #:	1003807
Conveyance:	SECURITY AGREEMENT

Total properties: 53

Patent #:	6667244	Issue Dt:	12/23/2003	Application #:	09534657	Filing Dt:	03/24/2000
Title:	METHOD FOR ETCHING SIDEWALL POLYMER AND OTHER RESIDUES FROM THE SURFACE OF SEMICONDUCTOR DEVICES

Patent #:	6537419	Issue Dt:	03/25/2003	Application #:	09558606	Filing Dt:	04/26/2000
Title:	GAS DISTRIBUTION PLATE ASSEMBLY FOR PROVIDING LAMINAR GAS FLOW ACROSS THE SURFACE OF A SUBSTRATE

Patent #:	6428262	Issue Dt:	08/06/2002	Application #:	09637096	Filing Dt:	08/10/2000
Title:	COMPACT LOAD LOCK SYSTEM FOR ION BEAM PROCESSING OF FOUPS

Patent #:	6608315	Issue Dt:	08/19/2003	Application #:	09703769	Filing Dt:	11/01/2000
Title:	MECHANISM FOR PREVENTION OF NEUTRON RADIATION IN ION IMPLANTER BEAMLINE

Patent #:	6600163	Issue Dt:	07/29/2003	Application #:	09748735	Filing Dt:	12/22/2000
Publication #:	US20020079465	Pub Dt:	06/27/2002
Title:	IN-PROCESS WAFER CHARGE MONITOR AND CONTROL SYSTEM FOR ION IMPLANTER

Patent #:	6661016	Issue Dt:	12/09/2003	Application #:	09887808	Filing Dt:	06/22/2001
Publication #:	US20010054698	Pub Dt:	12/27/2001
Title:	ION IMPLANTATION UNIFORMITY CORRECTION USING BEAM CURRENT CONTROL

Patent #:	6696688	Issue Dt:	02/24/2004	Application #:	09949072	Filing Dt:	09/07/2001
Publication #:	US20020109099	Pub Dt:	08/15/2002
Title:	APPARATUS FOR MAGNETICALLY SCANNING AND/OR SWITCHING A CHARGED-PARTICLE BEAM

Patent #:	6583421	Issue Dt:	06/24/2003	Application #:	09975685	Filing Dt:	10/11/2001
Publication #:	US20030071222	Pub Dt:	04/17/2003
Title:	CHARGE MEASURING DEVICE WITH WIDE DYNAMIC RANGE

Patent #:	6727509	Issue Dt:	04/27/2004	Application #:	10023516	Filing Dt:	12/17/2001
Publication #:	US20030111617	Pub Dt:	06/19/2003
Title:	WAFER PEDESTAL TILT MECHANISM

Patent #:	7247863	Issue Dt:	07/24/2007	Application #:	10032664	Filing Dt:	10/19/2001
Publication #:	US20020053642	Pub Dt:	05/09/2002
Title:	SYSTEM AND METHOD FOR RAPIDLY CONTROLLING THE OUTPUT OF AN ION SOURCE FOR ION IMPLANTATION

Patent #:	6734439	Issue Dt:	05/11/2004	Application #:	10054325	Filing Dt:	10/25/2001
Publication #:	US20030080300	Pub Dt:	05/01/2003
Title:	WAFER PEDESTAL TILT MECHANISM AND COOLING SYSTEM

Patent #:	6736927	Issue Dt:	05/18/2004	Application #:	10167937	Filing Dt:	06/10/2002
Publication #:	US20020153099	Pub Dt:	10/24/2002
Title:	APPARATUS FOR INCREASED WORKPIECE THROUGHPUT

Patent #:	6703628	Issue Dt:	03/09/2004	Application #:	10444413	Filing Dt:	05/23/2003
Publication #:	US20030201402	Pub Dt:	10/30/2003
Title:	METHOD AND SYSTEM FOR ION BEAM CONTAINMENT IN AN ION BEAM GUIDE

Patent #:	6969227	Issue Dt:	11/29/2005	Application #:	10663519	Filing Dt:	09/16/2003
Publication #:	US20040076505	Pub Dt:	04/22/2004
Title:	WAFER TRANSPORT APPARATUS

Patent #:	7352554	Issue Dt:	04/01/2008	Application #:	10880895	Filing Dt:	06/30/2004
Publication #:	US20060002052	Pub Dt:	01/05/2006
Title:	METHOD FOR FABRICATING A JOHNSEN-RAHBEK ELECTROSTATIC WAFER CLAMP

Patent #:	7915597	Issue Dt:	03/29/2011	Application #:	12050594	Filing Dt:	03/18/2008
Publication #:	US20090236547	Pub Dt:	09/24/2009
Title:	EXTRACTION ELECTRODE SYSTEM FOR HIGH CURRENT ION IMPLANTER

Patent #:	7994488	Issue Dt:	08/09/2011	Application #:	12108890	Filing Dt:	04/24/2008
Publication #:	US20090267001	Pub Dt:	10/29/2009
Title:	LOW CONTAMINATION, LOW ENERGY BEAMLINE ARCHITECTURE FOR HIGH CURRENT ION IMPLANTATION

Patent #:	9036326	Issue Dt:	05/19/2015	Application #:	12113091	Filing Dt:	04/30/2008
Publication #:	US20090273878	Pub Dt:	11/05/2009
Title:	GAS BEARING ELECTROSTATIC CHUCK

Patent #:	7759657	Issue Dt:	07/20/2010	Application #:	12142081	Filing Dt:	06/19/2008
Publication #:	US20090314958	Pub Dt:	12/24/2009
Title:	METHODS FOR IMPLANTING B22HX AND ITS IONIZED LOWER MASS BYPRODUCTS

Patent #:	7858955	Issue Dt:	12/28/2010	Application #:	12145713	Filing Dt:	06/25/2008
Publication #:	US20090321657	Pub Dt:	12/31/2009
Title:	SYSTEM AND METHOD OF CONTROLLING BROAD BEAM UNIFORMITY

Patent #:	7977628	Issue Dt:	07/12/2011	Application #:	12146122	Filing Dt:	06/25/2008
Publication #:	US20090321632	Pub Dt:	12/31/2009
Title:	SYSTEM AND METHOD FOR REDUCING PARTICLES AND CONTAMINATION BY MATCHING BEAM COMPLEMENTARY APERTURE SHAPES TO BEAM SHAPES

Patent #:	7897944	Issue Dt:	03/01/2011	Application #:	12176748	Filing Dt:	07/21/2008
Publication #:	US20100012861	Pub Dt:	01/21/2010
Title:	METHOD AND APPARATUS FOR MEASUREMENT OF BEAM ANGLE IN ION IMPLANTATION

Patent #:	8226142	Issue Dt:	07/24/2012	Application #:	12178014	Filing Dt:	07/23/2008
Publication #:	US20090039664	Pub Dt:	02/12/2009
Title:	WORKPIECE GRIPPING INTEGRITY SENSOR

Patent #:	7750314	Issue Dt:	07/06/2010	Application #:	12183787	Filing Dt:	07/31/2008
Publication #:	US20090032727	Pub Dt:	02/05/2009
Title:	ELEVATED TEMPERATURE RF ION SOURCE

Patent #:	7947966	Issue Dt:	05/24/2011	Application #:	12183961	Filing Dt:	07/31/2008
Publication #:	US20090114841	Pub Dt:	05/07/2009
Title:	DOUBLE PLASMA ION SOURCE

Patent #:	8193513	Issue Dt:	06/05/2012	Application #:	12184082	Filing Dt:	07/31/2008
Publication #:	US20090032728	Pub Dt:	02/05/2009
Title:	HYBRID ION SOURCE/MULTIMODE ION SOURCE

Patent #:	7973290	Issue Dt:	07/05/2011	Application #:	12190736	Filing Dt:	08/13/2008
Publication #:	US20100038553	Pub Dt:	02/18/2010
Title:	SYSTEM AND METHOD OF BEAM ENERGY IDENTIFICATION FOR SINGLE WAFER ION IMPLANTATION

Patent #:	NONE	Issue Dt:		Application #:	12212507	Filing Dt:	09/17/2008
Publication #:	US20100065761	Pub Dt:	03/18/2010
Title:	ADJUSTABLE DEFLECTION OPTICS FOR ION IMPLANTATION

Patent #:	7842931	Issue Dt:	11/30/2010	Application #:	12238265	Filing Dt:	09/25/2008
Publication #:	US20100072402	Pub Dt:	03/25/2010
Title:	EXTRACTION ELECTRODE MANIPULATOR

Patent #:	9443698	Issue Dt:	09/13/2016	Application #:	12245866	Filing Dt:	10/06/2008
Publication #:	US20100084576	Pub Dt:	04/08/2010
Title:	HYBRID SCANNING FOR ION IMPLANTATION

Patent #:	7952851	Issue Dt:	05/31/2011	Application #:	12262399	Filing Dt:	10/31/2008
Publication #:	US20100110603	Pub Dt:	05/06/2010
Title:	WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS

Patent #:	8902560	Issue Dt:	12/02/2014	Application #:	12262990	Filing Dt:	10/31/2008
Publication #:	US20100110604	Pub Dt:	05/06/2010
Title:	ELECTROSTATIC CHUCK GROUND PUNCH

Patent #:	NONE	Issue Dt:		Application #:	12275394	Filing Dt:	11/21/2008
Publication #:	US20100130017	Pub Dt:	05/27/2010
Title:	FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS

Patent #:	8270142	Issue Dt:	09/18/2012	Application #:	12331619	Filing Dt:	12/10/2008
Publication #:	US20100142113	Pub Dt:	06/10/2010
Title:	DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK

Patent #:	8023247	Issue Dt:	09/20/2011	Application #:	12331813	Filing Dt:	12/10/2008
Publication #:	US20100142114	Pub Dt:	06/10/2010
Title:	ELECTROSTATIC CHUCK WITH COMPLIANT COAT

Patent #:	8008636	Issue Dt:	08/30/2011	Application #:	12338644	Filing Dt:	12/18/2008
Publication #:	US20100155623	Pub Dt:	06/24/2010
Title:	ION IMPLANTATION WITH DIMINISHED SCANNING FIELD EFFECTS

Patent #:	9611540	Issue Dt:	04/04/2017	Application #:	12340936	Filing Dt:	12/22/2008
Publication #:	US20100159153	Pub Dt:	06/24/2010
Title:	ELECTROSTATIC CHUCK SHIELDING MECHANISM

Patent #:	8168941	Issue Dt:	05/01/2012	Application #:	12357688	Filing Dt:	01/22/2009
Publication #:	US20100181470	Pub Dt:	07/22/2010
Title:	ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIBBON BEAMS

Patent #:	8237135	Issue Dt:	08/07/2012	Application #:	12357973	Filing Dt:	01/22/2009
Publication #:	US20100181499	Pub Dt:	07/22/2010
Title:	ENHANCED LOW ENERGY ION BEAM TRANSPORT IN ION IMPLANTATION

Patent #:	8241425	Issue Dt:	08/14/2012	Application #:	12358788	Filing Dt:	01/23/2009
Publication #:	US20100187447	Pub Dt:	07/29/2010
Title:	NON-CONDENSING THERMOS CHUCK

Patent #:	8089052	Issue Dt:	01/03/2012	Application #:	12423066	Filing Dt:	04/14/2009
Publication #:	US20090266997	Pub Dt:	10/29/2009
Title:	ION SOURCE WITH ADJUSTABLE APERTURE

Patent #:	8071964	Issue Dt:	12/06/2011	Application #:	12431081	Filing Dt:	04/28/2009
Publication #:	US20090272918	Pub Dt:	11/05/2009
Title:	SYSTEM AND METHOD OF PERFORMING UNIFORM DOSE IMPLANTATION UNDER ADVERSE CONDITIONS

Patent #:	7994487	Issue Dt:	08/09/2011	Application #:	12474786	Filing Dt:	05/29/2009
Publication #:	US20090294698	Pub Dt:	12/03/2009
Title:	CONTROL OF PARTICLES ON SEMICONDUCTOR WAFERS WHEN IMPLANTING BORON HYDRIDES

Patent #:	8124946	Issue Dt:	02/28/2012	Application #:	12477631	Filing Dt:	06/03/2009
Publication #:	US20090321630	Pub Dt:	12/31/2009
Title:	POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS

Patent #:	8227768	Issue Dt:	07/24/2012	Application #:	12487229	Filing Dt:	06/18/2009
Publication #:	US20090321631	Pub Dt:	12/31/2009
Title:	LOW-INERTIA MULTI-AXIS MULTI-DIRECTIONAL MECHANICALLY SCANNED ION IMPLANTATION SYSTEM

Patent #:	8071451	Issue Dt:	12/06/2011	Application #:	12511737	Filing Dt:	07/29/2009
Publication #:	US20110027957	Pub Dt:	02/03/2011
Title:	METHOD OF DOPING SEMICONDUCTORS

Patent #:	8035080	Issue Dt:	10/11/2011	Application #:	12609912	Filing Dt:	10/30/2009
Publication #:	US20110101213	Pub Dt:	05/05/2011
Title:	METHOD AND SYSTEM FOR INCREASING BEAM CURRENT ABOVE A MAXIMUM ENERGY FOR A CHARGE STATE

Patent #:	NONE	Issue Dt:		Application #:	12616662	Filing Dt:	11/11/2009
Publication #:	US20110108058	Pub Dt:	05/12/2011
Title:	METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT

Patent #:	8906195	Issue Dt:	12/09/2014	Application #:	12621136	Filing Dt:	11/18/2009
Publication #:	US20110114115	Pub Dt:	05/19/2011
Title:	TUNING HARDWARE FOR PLASMA ASHING APPARATUS AND METHODS OF USE THEREOF

Patent #:	NONE	Issue Dt:		Application #:	12631117	Filing Dt:	12/04/2009
Publication #:	US20110136346	Pub Dt:	06/09/2011
Title:	Substantially Non-Oxidizing Plasma Treatment Devices and Processes

Patent #:	8153814	Issue Dt:	04/10/2012	Application #:	12685913	Filing Dt:	01/12/2010
Publication #:	US20100197655	Pub Dt:	08/05/2010
Title:	SULFONAMIDE DERIVATIVES

Patent #:	NONE	Issue Dt:		Application #:	12694597	Filing Dt:	01/27/2010
Publication #:	US20110180097	Pub Dt:	07/28/2011
Title:	THERMAL ISOLATION ASSEMBLIES FOR WAFER TRANSPORT APPARATUS AND METHODS OF USE THEREOF

Patent #:	8080814	Issue Dt:	12/20/2011	Application #:	12717536	Filing Dt:	03/04/2010
Publication #:	US20110215262	Pub Dt:	09/08/2011
Title:	METHOD FOR IMPROVING IMPLANT UNIFORMITY DURING PHOTORESIST OUTGASSING

Assignor

AXCELIS TECHNOLOGIES, INC.

Exec Dt:

03/12/2010

Assignee

SILICON VALLEY BANK

3003 TASMAN DRIVE

SANTA CLARA, CALIFORNIA 95054

Correspondence name and address
	CHRISTOPHER E. KONDRACKI
	1501 WILSON BOULEVARD
	SUITE 510
	ARLINGTON, VA 22209

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