Patent Assignment Details
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| Reel/Frame: | 031799/0500 | |
| Pages: | 5 |
| | Recorded: | 12/17/2013 | | |
| Attorney Dkt #: | 0202.0027US1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/02/2016
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Application #:
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14108727
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Filing Dt:
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12/17/2013
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Publication #:
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Pub Dt:
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06/26/2014
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Title:
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Method of Calibrating a DPP-Generated EUV Light Source
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Assignee
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| 15 STEINBACHSTRASSE |
| AACHEN, GERMANY 52074 |
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Correspondence name and address
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MARIA M. ELISEEVA
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PATENTBAR INTERNATIONAL, P.C.
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1087 BEACON STREET, SUITE 303
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NEWTON, MA 02459
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09/24/2024 01:08 PM
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