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Total properties:
10
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Patent #:
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Issue Dt:
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04/17/2012
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Application #:
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11408333
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/12/2007
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Title:
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CAPACITIVELY COUPLED PLASMA REACTOR HAVING VERY AGILE WAFER TEMPERATURE CONTROL
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Patent #:
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Issue Dt:
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09/20/2011
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Application #:
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11408558
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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METHOD FOR AGILE WORKPIECE TEMPERATURE CONTROL IN A PLASMA REACTOR USING A THERMAL MODEL
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Patent #:
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Issue Dt:
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09/06/2011
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Application #:
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11408559
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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PLASMA REACTOR WITH A MULTIPLE ZONE THERMAL CONTROL FEED FORWARD CONTROL APPARATUS
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Patent #:
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Issue Dt:
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07/17/2012
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Application #:
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11408567
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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PLASMA REACTOR WITH WAFER BACKSIDE THERMAL LOOP, TWO-PHASE INTERNAL PEDESTAL THERMAL LOOP AND A CONTROL PROCESSOR GOVERNING BOTH LOOPS
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Patent #:
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Issue Dt:
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12/17/2013
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Application #:
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11409183
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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PLASMA REACTOR WITH FEED FORWARD THERMAL CONTROL SYSTEM USING A THERMAL MODEL FOR ACCOMMODATING RF POWER CHANGES OR WAFER TEMPERATURE CHANGES
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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11409292
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/12/2007
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Title:
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CAPACITIVELY COUPLED PLASMA REACTOR HAVING A COOLED/HEATED WAFER SUPPORT WITH UNIFORM TEMPERATURE DISTRIBUTION
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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11410782
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Filing Dt:
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04/24/2006
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Publication #:
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Pub Dt:
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05/03/2007
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Title:
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METHOD OF COOLING A WAFER SUPPORT AT A UNIFORM TEMPERATURE IN A CAPACITIVELY COUPLED PLASMA REACTOR
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Patent #:
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Issue Dt:
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08/02/2011
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Application #:
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11410859
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Filing Dt:
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04/24/2006
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Publication #:
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Pub Dt:
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04/12/2007
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Title:
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METHOD OF OPERATING A CAPACITIVELY COUPLED PLASMA REACTOR WITH DUAL TEMPERATURE CONTROL LOOPS
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Patent #:
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Issue Dt:
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12/11/2012
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Application #:
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12949028
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Filing Dt:
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11/18/2010
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Publication #:
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Pub Dt:
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03/17/2011
| | | | |
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Title:
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METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING FEED FORWARD THERMAL CONTROL
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|
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Patent #:
|
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Issue Dt:
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10/01/2013
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Application #:
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12953793
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Filing Dt:
|
11/24/2010
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Publication #:
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Pub Dt:
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03/24/2011
| | | | |
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Title:
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METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING MULTIPLE ZONE FEED FORWARD THERMAL CONTROL
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