Total properties:
45
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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09764913
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Filing Dt:
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01/17/2001
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Title:
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METHOD AND APPARATUS FOR ASSEMBLING AN ARRAY OF MICRO-DEVICES
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10189607
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Filing Dt:
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07/08/2002
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Publication #:
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Pub Dt:
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01/08/2004
| | | | |
Title:
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METHOD AND APPARATUS FOR SORTING BIOLOGICAL CELLS WITH A MEMS DEVICE
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Patent #:
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Issue Dt:
|
06/06/2006
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Application #:
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10866123
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Filing Dt:
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06/12/2004
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Publication #:
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Pub Dt:
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01/06/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR ASSEMBLING AN ARRAY OF MICRO-DEVICES
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Patent #:
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Issue Dt:
|
09/04/2007
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Application #:
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10978947
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Filing Dt:
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11/01/2004
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Publication #:
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Pub Dt:
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03/24/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR SORTING BIOLOGICAL CELLS WITH A MEMS DEVICE
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Patent #:
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Issue Dt:
|
05/22/2007
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Application #:
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11196291
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Filing Dt:
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08/04/2005
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Publication #:
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Pub Dt:
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12/22/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR SORTING PARTICLES WITH A MEMS DEVICE
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Patent #:
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Issue Dt:
|
05/05/2009
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Application #:
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11211623
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Filing Dt:
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08/26/2005
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Publication #:
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Pub Dt:
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10/11/2007
| | | | |
Title:
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DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH HERMETIC SEAL AND METHOD OF MANUFACTURE
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Patent #:
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Issue Dt:
|
06/19/2007
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Application #:
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11211624
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Filing Dt:
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08/26/2005
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Publication #:
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Pub Dt:
|
03/01/2007
| | | | |
Title:
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TRENCH PLATING PROCESS AND APPARATUS FOR THROUGH HOLE VIAS
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Patent #:
|
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Issue Dt:
|
09/01/2009
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Application #:
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11211625
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Filing Dt:
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08/26/2005
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Publication #:
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Pub Dt:
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03/01/2007
| | | | |
Title:
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HERMETIC INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURE
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|
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Patent #:
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|
Issue Dt:
|
10/02/2007
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Application #:
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11221745
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Filing Dt:
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09/09/2005
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Publication #:
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Pub Dt:
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03/15/2007
| | | | |
Title:
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MULTIPLE SWITCH MEMS STRUCTURE AND METHOD OF MANUFACTURE
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|
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Patent #:
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Issue Dt:
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06/12/2007
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Application #:
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11260367
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Filing Dt:
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10/28/2005
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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MEMS ACTUATOR AND METHOD OF MANUFACTURE FOR MEMS PARTICLE SORTING DEVICE
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Patent #:
|
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Issue Dt:
|
11/28/2006
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Application #:
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11272689
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Filing Dt:
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11/15/2005
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Publication #:
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Pub Dt:
|
03/23/2006
| | | | |
Title:
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METHOD AND APPARATUS FOR ASSEMBLING AN ARRAY OF MICRO-DEVICES
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|
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Patent #:
|
|
Issue Dt:
|
08/04/2009
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Application #:
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11304601
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Filing Dt:
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12/16/2005
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Publication #:
|
|
Pub Dt:
|
03/01/2007
| | | | |
Title:
|
WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH RAISED FEATURE
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|
|
Patent #:
|
|
Issue Dt:
|
06/16/2009
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Application #:
|
11334438
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Filing Dt:
|
01/19/2006
|
Publication #:
|
|
Pub Dt:
|
07/26/2007
| | | | |
Title:
|
HYSTERETIC MEMS THERMAL DEVICE AND METHOD OF MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/19/2009
|
Application #:
|
11347219
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Filing Dt:
|
02/06/2006
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Publication #:
|
|
Pub Dt:
|
08/09/2007
| | | | |
Title:
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ELASTIC INTERFACE FOR WAFER BONDING APPARATUS
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|
|
Patent #:
|
|
Issue Dt:
|
08/31/2010
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Application #:
|
11359558
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Filing Dt:
|
02/23/2006
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Publication #:
|
|
Pub Dt:
|
08/23/2007
| | | | |
Title:
|
SYSTEM AND METHOD FOR FORMING MOVEABLE FEATURES ON A COMPOSITE SUBSTRATE
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|
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Patent #:
|
|
Issue Dt:
|
01/18/2011
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Application #:
|
11378340
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Filing Dt:
|
03/20/2006
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Publication #:
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|
Pub Dt:
|
09/20/2007
| | | | |
Title:
|
MEMS THERMAL DEVICE WITH SLIDEABLY ENGAGED TETHER AND METHOD OF MANUFACTURE
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|
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Patent #:
|
|
Issue Dt:
|
10/12/2010
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Application #:
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11386733
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Filing Dt:
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03/23/2006
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Publication #:
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|
Pub Dt:
|
09/27/2007
| | | | |
Title:
|
MEMS DEVICE USING NIMN ALLOY AND METHOD OF MANUFACTURE
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|
|
Patent #:
|
|
Issue Dt:
|
10/05/2010
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Application #:
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11390085
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Filing Dt:
|
03/28/2006
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Publication #:
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|
Pub Dt:
|
10/11/2007
| | | | |
Title:
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WAFER BONDING MATERIAL WITH EMBEDDED RIGID PARTICLES
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|
|
Patent #:
|
|
Issue Dt:
|
12/09/2008
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Application #:
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11433435
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Filing Dt:
|
05/15/2006
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Publication #:
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|
Pub Dt:
|
11/15/2007
| | | | |
Title:
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INDENTED STRUCTURE FOR ENCAPSULATED DEVICES AND METHOD OF MANUFACTURE
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|
|
Patent #:
|
|
Issue Dt:
|
06/23/2009
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Application #:
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11434768
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Filing Dt:
|
05/17/2006
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Publication #:
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|
Pub Dt:
|
11/22/2007
| | | | |
Title:
|
SYSTEM AND METHOD FOR PROVIDING ACCESS TO AN ENCAPSULATED DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/09/2010
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Application #:
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11541774
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Filing Dt:
|
10/03/2006
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Publication #:
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|
Pub Dt:
|
04/03/2008
| | | | |
Title:
|
INTERCONNECT STRUCTURE USING THROUGH WAFER VIAS AND METHOD OF FABRICATION
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|
|
Patent #:
|
|
Issue Dt:
|
03/30/2010
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Application #:
|
11546288
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Filing Dt:
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10/12/2006
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Publication #:
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Pub Dt:
|
04/17/2008
| | | | |
Title:
|
CONTACT ELECTRODE FOR MICRODEVICES AND ETCH METHOD OF MANUFACTURE
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|
|
Patent #:
|
|
Issue Dt:
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06/28/2011
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Application #:
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11797659
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Filing Dt:
|
05/07/2007
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Publication #:
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|
Pub Dt:
|
11/13/2008
| | | | |
Title:
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LID STRUCTURE FOR MICRODEVICE AND METHOD OF MANUFACTURE
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|
|
Patent #:
|
|
Issue Dt:
|
02/22/2011
|
Application #:
|
11797924
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Filing Dt:
|
05/09/2007
|
Publication #:
|
|
Pub Dt:
|
11/13/2008
| | | | |
Title:
|
DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2011
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Application #:
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11896648
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Filing Dt:
|
09/05/2007
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Publication #:
|
|
Pub Dt:
|
12/27/2007
| | | | |
Title:
|
WAFER BONDING MATERIAL WITH EMBEDDED CONDUCTIVE PARTICLES
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|
|
Patent #:
|
|
Issue Dt:
|
01/04/2011
|
Application #:
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12068586
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Filing Dt:
|
02/08/2008
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Publication #:
|
|
Pub Dt:
|
11/13/2008
| | | | |
Title:
|
MEMS PLATE SWITCH AND METHOD OF MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/2012
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Application #:
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12232298
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Filing Dt:
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09/15/2008
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Publication #:
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|
Pub Dt:
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01/19/2012
| | | | |
Title:
|
SYSTEM AND METHOD FOR PROVIDING ACCESS TO AN ENCAPSULATED DEVICE
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|
|
Patent #:
|
|
Issue Dt:
|
07/20/2010
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Application #:
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12285817
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Filing Dt:
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10/15/2008
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Publication #:
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|
Pub Dt:
|
02/26/2009
| | | | |
Title:
|
INDENTED LID FOR ENCAPSULATED DEVICES AND METHOD OF MANUFACTURE
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|
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Patent #:
|
|
Issue Dt:
|
05/17/2011
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Application #:
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12318634
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Filing Dt:
|
01/05/2009
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Publication #:
|
|
Pub Dt:
|
08/13/2009
| | | | |
Title:
|
HYSTERETIC MEMS THERMAL DEVICE AND METHOD OF MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2011
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Application #:
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12459956
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Filing Dt:
|
07/11/2009
|
Publication #:
|
|
Pub Dt:
|
01/07/2010
| | | | |
Title:
|
WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH RAISED FEATURE
|
|
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Patent #:
|
|
Issue Dt:
|
08/21/2012
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Application #:
|
12588060
|
Filing Dt:
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10/02/2009
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Publication #:
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Pub Dt:
|
01/28/2010
| | | | |
Title:
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METHOD OF MANUFACTURING A HYSTERETIC MEMS TWO-DIMENSIONAL THERMAL DEVICE
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|
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Patent #:
|
|
Issue Dt:
|
09/24/2013
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Application #:
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12662237
|
Filing Dt:
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04/07/2010
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Publication #:
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Pub Dt:
|
10/13/2011
| | | | |
Title:
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Inlaid optical material and method of manufacture
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|
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Patent #:
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|
Issue Dt:
|
04/08/2014
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Application #:
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12801162
|
Filing Dt:
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05/26/2010
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Publication #:
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Pub Dt:
|
12/01/2011
| | | | |
Title:
|
IN-PLANE ELECTROMAGNETIC MEMS PUMP
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|
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Patent #:
|
|
Issue Dt:
|
01/01/2013
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Application #:
|
12923693
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Filing Dt:
|
10/05/2010
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Publication #:
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Pub Dt:
|
04/05/2012
| | | | |
Title:
|
PLATING PROCESS AND APPARATUS FOR THROUGH WAFER FEATURES
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|
Patent #:
|
|
Issue Dt:
|
06/18/2013
|
Application #:
|
12929257
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Filing Dt:
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01/11/2011
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Publication #:
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Pub Dt:
|
06/02/2011
| | | | |
Title:
|
CONFIGURABLE POWER SUPPLY USING MEMS SWITCH
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|
|
Patent #:
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|
Issue Dt:
|
09/11/2012
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Application #:
|
12929259
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Filing Dt:
|
01/11/2011
|
Publication #:
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Pub Dt:
|
06/30/2011
| | | | |
Title:
|
DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE
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Patent #:
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Issue Dt:
|
12/25/2012
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Application #:
|
13373969
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Filing Dt:
|
12/07/2011
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Title:
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METHOD AND APPARATUS FOR APPLYING THIN LIQUID COATINGS
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Patent #:
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Issue Dt:
|
09/02/2014
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Application #:
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13374899
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Filing Dt:
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01/23/2012
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Publication #:
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Pub Dt:
|
07/26/2012
| | | | |
Title:
|
Cartridge for MEMS particle sorting system
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|
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Patent #:
|
|
Issue Dt:
|
05/27/2014
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Application #:
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13573201
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Filing Dt:
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08/30/2012
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Publication #:
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Pub Dt:
|
12/20/2012
| | | | |
Title:
|
WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH KEEPER LAYER
|
|
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Patent #:
|
|
Issue Dt:
|
09/30/2014
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Application #:
|
13986467
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Filing Dt:
|
05/07/2013
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Title:
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EXOTHERMIC ACTIVATION FOR HIGH VACUUM PACKAGING
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|
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Patent #:
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|
Issue Dt:
|
03/01/2016
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Application #:
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13987463
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Filing Dt:
|
07/29/2013
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Publication #:
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Pub Dt:
|
01/29/2015
| | | | |
Title:
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Microfabricated magnetic field transducer with flux guide
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|
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Patent #:
|
|
Issue Dt:
|
06/21/2016
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Application #:
|
13987464
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Filing Dt:
|
07/29/2013
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Publication #:
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Pub Dt:
|
01/29/2015
| | | | |
Title:
|
MEMS PARTICLE SORTING ACTUATOR AND METHOD OF MANUFACTURE
|
|
|
Patent #:
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|
Issue Dt:
|
04/19/2016
|
Application #:
|
14142712
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Filing Dt:
|
12/27/2013
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Publication #:
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|
Pub Dt:
|
07/02/2015
| | | | |
Title:
|
METHOD USING GLASS SUBSTRATE ANODIC BONDING
|
|
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Patent #:
|
|
Issue Dt:
|
07/12/2016
|
Application #:
|
14158829
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Filing Dt:
|
01/19/2014
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Publication #:
|
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Pub Dt:
|
07/02/2015
| | | | |
Title:
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DEVICE USING GLASS SUBSTRATE ANODIC BONDING
|
|
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Patent #:
|
|
Issue Dt:
|
10/13/2015
|
Application #:
|
14326406
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Filing Dt:
|
07/08/2014
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Title:
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METHOD AND DEVICE USING SILICON SUBSTRATE TO GLASS SUBSTRATE ANODIC BONDING
|
|